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Cleanroom Material Handling and Storage
Wafer Transport Cart
An electropolished stainless wafer transport cart with two perforated retained shelves, round-tube frame, integrated push handle, cleanroom casters and grounding chain.
- Angled perforated shelves keep wafer boxes seated against retaining rails
- Electropolished round-tube frame minimizes ledges and square-profile corners
- Cleanroom casters and grounding provision support sensitive semiconductor transfer
Product Introduction
The wafer transport cart is configured for manual movement of closed wafer boxes and lot carriers between semiconductor work areas. Two perforated shelves allow vertical airflow and are inclined slightly toward the rear so carriers rest against the retention rails rather than the aisle edge. Rounded stainless posts and an integrated handle create an accessible wipe-down path, while polyurethane casters provide controlled mobility on finished cleanroom floors.
Key Features
Perforations reduce broad horizontal particle-collection surfaces.
Three-sided shelf rails resist carrier migration during starts and turns.
Round stainless tubing presents fewer sharp ledges than open structural angles.
Grounding and cleanroom-caster options address static and vibration concerns.
Customer Product Concerns
Ordinary utility carts allow carriers to slide, create particle-catching shelf surfaces and transmit floor shock directly into fragile wafer loads.
Carrier movement during turnsSlightly angled shelves and raised rails retain boxes within the deck perimeter.
Particle accumulationPerforated panels and rounded tubes expose easier cleaning paths and support airflow.
Wheel shock reaching wafersSelected polyurethane or spring-loaded casters reduce harsh rolling input.
Electrostatic charge on the frameConductive caster and grounding-chain options provide a defined dissipation path.
Typical Applications
Manual transport of 150 mm, 200 mm or 300 mm wafer boxes, lot boxes and protected wafer carriers between stockers, inspection stations, wet-process support areas and metrology cells.
Technical Parameters
Shelf plan, retaining-rail height and rearward angle are selected around the target wafer-box footprint and handling method. The welded frame transfers shelf loads directly to four corner posts and stem-mounted swivel casters. Electropolishing smooths exposed stainless surfaces; conductive wheel compounds, grounding chain and spring-loaded caster assemblies can be added where electrostatic and shock control are required.
| Core Material | 304 or 316L stainless steel frame and shelves with cleanroom-compatible polyurethane casters |
|---|---|
| Panel Thickness | 1.2–2.0 mm perforated shelf panels |
| Effective Width | 365–1350 mm usable shelf width |
| Maximum Length | Up to 1420 mm overall cart length |
| Steel Facing Thickness | 1.2–2.0 mm exposed stainless shelf surfaces |
| Core Density | 7900–8000 kg/m³ nominal stainless steel density |
| Thermal Conductivity | Approximately 14.6–16.2 W/(m·K) at room temperature |
| Surface Finish | Electropolished or fine mechanically polished stainless steel |
| Joint Type | Continuously welded round-tube frame with retained perforated shelves and stem-mounted swivel casters |
| Customization | Available based on the intended application and operating environment. |
Available Options
304 or 316L stainless steel, shelf geometry for 150 mm, 200 mm or 300 mm carriers, alternative shelf count, electropolished finish, spring-loaded casters, conductive wheels, grounding chain, removable carrier dividers and parking brakes.
Planning a Wafer Transport Cart specification?
Send us your dimensions, installation conditions, performance targets and required surface finish.
