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Manuseio e Armazenamento de Materiais em Sala Limpa

Carrinho de transporte de wafer

An electropolished stainless wafer transport cart with two perforated retained shelves, round-tube frame, integrated push handle, cleanroom casters and grounding chain.
  • Angled perforated shelves keep wafer boxes seated against retaining rails
  • Electropolished round-tube frame minimizes ledges and square-profile corners
  • Cleanroom casters and grounding provision support sensitive semiconductor transfer
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Introdução do produto

The wafer transport cart is configured for manual movement of closed wafer boxes and lot carriers between semiconductor work areas. Two perforated shelves allow vertical airflow and are inclined slightly toward the rear so carriers rest against the retention rails rather than the aisle edge. Rounded stainless posts and an integrated handle create an accessible wipe-down path, while polyurethane casters provide controlled mobility on finished cleanroom floors.

Características-chave

Two carrier shelves separate wafer lots and keep the load within a compact footprint.

Perforations reduce broad horizontal particle-collection surfaces.

Three-sided shelf rails resist carrier migration during starts and turns.

Round stainless tubing presents fewer sharp ledges than open structural angles.

Grounding and cleanroom-caster options address static and vibration concerns.

Preocupações do produto do cliente

Ordinary utility carts allow carriers to slide, create particle-catching shelf surfaces and transmit floor shock directly into fragile wafer loads.

Carrier movement during turnsSlightly angled shelves and raised rails retain boxes within the deck perimeter.
Particle accumulationPerforated panels and rounded tubes expose easier cleaning paths and support airflow.
Wheel shock reaching wafersSelected polyurethane or spring-loaded casters reduce harsh rolling input.
Electrostatic charge on the frameConductive caster and grounding-chain options provide a defined dissipation path.

Aplicações típicas

Manual transport of 150 mm, 200 mm or 300 mm wafer boxes, lot boxes and protected wafer carriers between stockers, inspection stations, wet-process support areas and metrology cells.

Parâmetros técnicos

Shelf plan, retaining-rail height and rearward angle are selected around the target wafer-box footprint and handling method. The welded frame transfers shelf loads directly to four corner posts and stem-mounted swivel casters. Electropolishing smooths exposed stainless surfaces; conductive wheel compounds, grounding chain and spring-loaded caster assemblies can be added where electrostatic and shock control are required.

Material principal304 or 316L stainless steel frame and shelves with cleanroom-compatible polyurethane casters
Painel de espessura1.2–2.0 mm perforated shelf panels
Largura efetiva365–1350 mm usable shelf width
Comprimento máximoUp to 1420 mm overall cart length
Aço enfrentando espessura1.2–2.0 mm exposed stainless shelf surfaces
Densidade Core7900–8000 kg/m³ nominal stainless steel density
Condutividade térmica14,6 - 16,2 W / (m · K) à temperatura ambiente
Superfície acabadoElectropolished or fine mechanically polished stainless steel
Tipo conjuntoContinuously welded round-tube frame with retained perforated shelves and stem-mounted swivel casters
CustomizaçãoDisponível com base na aplicação pretendida e no ambiente operacional.

Opções disponíveis

304 or 316L stainless steel, shelf geometry for 150 mm, 200 mm or 300 mm carriers, alternative shelf count, electropolished finish, spring-loaded casters, conductive wheels, grounding chain, removable carrier dividers and parking brakes.

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