ウェーハ輸送カート
- Angled perforated shelves keep wafer boxes seated against retaining rails
- Electropolished round-tube frame minimizes ledges and square-profile corners
- Cleanroom casters and grounding provision support sensitive semiconductor transfer
商品紹介
The wafer transport cart is configured for manual movement of closed wafer boxes and lot carriers between semiconductor work areas. Two perforated shelves allow vertical airflow and are inclined slightly toward the rear so carriers rest against the retention rails rather than the aisle edge. Rounded stainless posts and an integrated handle create an accessible wipe-down path, while polyurethane casters provide controlled mobility on finished cleanroom floors.
主要な特徴
Perforations reduce broad horizontal particle-collection surfaces.
Three-sided shelf rails resist carrier migration during starts and turns.
Round stainless tubing presents fewer sharp ledges than open structural angles.
Grounding and cleanroom-caster options address static and vibration concerns.
お客様の製品に関する懸念事項
Ordinary utility carts allow carriers to slide, create particle-catching shelf surfaces and transmit floor shock directly into fragile wafer loads.
典型的な用途
技術的なパラメータ
Shelf plan, retaining-rail height and rearward angle are selected around the target wafer-box footprint and handling method. The welded frame transfers shelf loads directly to four corner posts and stem-mounted swivel casters. Electropolishing smooths exposed stainless surfaces; conductive wheel compounds, grounding chain and spring-loaded caster assemblies can be added where electrostatic and shock control are required.
| コア材料 | 304 or 316L stainless steel frame and shelves with cleanroom-compatible polyurethane casters |
|---|---|
| パネルの厚さ | 1.2–2.0 mm perforated shelf panels |
| 有効幅 | 365–1350 mm usable shelf width |
| 最大長さ | Up to 1420 mm overall cart length |
| 鋼鉄の厚さを直面する | 1.2–2.0 mm exposed stainless shelf surfaces |
| コア密度 | 7900–8000 kg/m³ nominal stainless steel density |
| 熱伝導率 | 室温で約 14.6 — 16.2 W / (m · K) |
| 表面仕上げ | Electropolished or fine mechanically polished stainless steel |
| ジョイントタイプ | Continuously welded round-tube frame with retained perforated shelves and stem-mounted swivel casters |
| カスタマイズ | 意図したアプリケーションと動作環境に基づいて利用できます。 |
利用可能なオプション
Planning a Wafer Transport Cart specification?
寸法、設置条件、性能目標、必要な表面仕上げをお送りください。

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