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ウェーハ輸送カート

An electropolished stainless wafer transport cart with two perforated retained shelves, round-tube frame, integrated push handle, cleanroom casters and grounding chain.
  • Angled perforated shelves keep wafer boxes seated against retaining rails
  • Electropolished round-tube frame minimizes ledges and square-profile corners
  • Cleanroom casters and grounding provision support sensitive semiconductor transfer
見積もりリクエスト 製品案内

商品紹介

The wafer transport cart is configured for manual movement of closed wafer boxes and lot carriers between semiconductor work areas. Two perforated shelves allow vertical airflow and are inclined slightly toward the rear so carriers rest against the retention rails rather than the aisle edge. Rounded stainless posts and an integrated handle create an accessible wipe-down path, while polyurethane casters provide controlled mobility on finished cleanroom floors.

主要な特徴

Two carrier shelves separate wafer lots and keep the load within a compact footprint.

Perforations reduce broad horizontal particle-collection surfaces.

Three-sided shelf rails resist carrier migration during starts and turns.

Round stainless tubing presents fewer sharp ledges than open structural angles.

Grounding and cleanroom-caster options address static and vibration concerns.

お客様の製品に関する懸念事項

Ordinary utility carts allow carriers to slide, create particle-catching shelf surfaces and transmit floor shock directly into fragile wafer loads.

Carrier movement during turnsSlightly angled shelves and raised rails retain boxes within the deck perimeter.
Particle accumulationPerforated panels and rounded tubes expose easier cleaning paths and support airflow.
Wheel shock reaching wafersSelected polyurethane or spring-loaded casters reduce harsh rolling input.
Electrostatic charge on the frameConductive caster and grounding-chain options provide a defined dissipation path.

典型的な用途

Manual transport of 150 mm, 200 mm or 300 mm wafer boxes, lot boxes and protected wafer carriers between stockers, inspection stations, wet-process support areas and metrology cells.

技術的なパラメータ

Shelf plan, retaining-rail height and rearward angle are selected around the target wafer-box footprint and handling method. The welded frame transfers shelf loads directly to four corner posts and stem-mounted swivel casters. Electropolishing smooths exposed stainless surfaces; conductive wheel compounds, grounding chain and spring-loaded caster assemblies can be added where electrostatic and shock control are required.

コア材料304 or 316L stainless steel frame and shelves with cleanroom-compatible polyurethane casters
パネルの厚さ1.2–2.0 mm perforated shelf panels
有効幅365–1350 mm usable shelf width
最大長さUp to 1420 mm overall cart length
鋼鉄の厚さを直面する1.2–2.0 mm exposed stainless shelf surfaces
コア密度7900–8000 kg/m³ nominal stainless steel density
熱伝導率室温で約 14.6 — 16.2 W / (m · K)
表面仕上げElectropolished or fine mechanically polished stainless steel
ジョイントタイプContinuously welded round-tube frame with retained perforated shelves and stem-mounted swivel casters
カスタマイズ意図したアプリケーションと動作環境に基づいて利用できます。

利用可能なオプション

304 or 316L stainless steel, shelf geometry for 150 mm, 200 mm or 300 mm carriers, alternative shelf count, electropolished finish, spring-loaded casters, conductive wheels, grounding chain, removable carrier dividers and parking brakes.

Planning a Wafer Transport Cart specification?

寸法、設置条件、性能目標、必要な表面仕上げをお送りください。

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