Industry-Specific Cleanroom Equipment

Wafer Storage Cabinet

A sealed multi-chamber cabinet that stores wafer boxes in a clean, dry and visible environment with configurable nitrogen purge control.

Sealed Wafer Storage
Controlled Nitrogen Purge
Independent Clear Chambers
200 mm and 300 mm Compatibility

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Product Introduction

The wafer storage cabinet is arranged around sealed transparent compartments, adjustable shelves and a common dry-gas distribution system. Each chamber provides direct visual inventory checking while limiting the exposure of other stored lots when one door is opened. Stainless steel door frames, compression latches and cleanable internal surfaces support semiconductor storage areas where moisture, particles and handling discipline must be controlled.

Key Features

Individually accessed chambers reduce disturbance to wafer boxes stored in adjacent compartments.

A distribution plenum delivers dry nitrogen to the cabinet through controlled inlet connections.

Transparent static-dissipative panel options improve visibility while supporting electrostatic-control practices.

Adjustable shelves accommodate common 200 mm and 300 mm wafer lot-box formats.

Customer Product Concerns

Stored wafer lots need protection from ambient humidity and particles without making identification or retrieval unnecessarily difficult.

Opening a large shared cabinet exposes every stored lot to room air.Individually sealed compartments isolate the accessed wafer box from adjacent storage positions.

Uneven purge flow leaves some cabinet areas slower to reach the required humidity.A dedicated distribution plenum and chamber inlets promote consistent dry-gas delivery.

Operators cannot confirm inventory without repeatedly opening opaque doors.Clear chamber panels allow rapid visual checks while the compartment remains closed.

Fixed shelf spacing wastes capacity when wafer-box formats change.Adjustable clean shelves can be positioned around the selected 200 mm or 300 mm containers.

Typical Applications

Semiconductor wafer lot bufferingPre-process wafer box storageMetrology and inspection areasDry storage between fabrication steps

Technical Parameters

Typical construction values for a multi-chamber wafer storage cabinet are shown below.

Core Material	304 stainless steel frame with clear acrylic or static-dissipative PVC chamber panels
Panel Thickness	6-10 mm transparent chamber panels
Effective Width	500-1400 mm cabinet width
Maximum Length	Up to 2200 mm cabinet height
Steel Facing Thickness	1.0-1.5 mm stainless steel frame and base panels
Core Density	1180-1420 kg/m³ for polymer panels and 7850-8000 kg/m³ for stainless components
Thermal Conductivity	0.19-0.21 W/(m·K) for clear acrylic panels
Surface Finish	Clear polished chamber panels with brushed stainless steel frames and shelves
Joint Type	Gasketed hinged chamber doors with compression latches and plenum-fed purge connections
Customization	Available based on the intended application and operating environment.

Available Options

Static-dissipative PVC chambersAutomatic humidity controllerIndependent chamber flow adjustmentWafer-box-specific shelf layouts

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