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Equipement de salle blanche spécifique à l'industrie
Cabinet de stockage Wafer
A sealed multi-chamber cabinet that stores wafer boxes in a clean, dry and visible environment with configurable nitrogen purge control.
- Sealed Wafer Storage
- Controlled Nitrogen Purge
- Independent Clear Chambers
- 200 mm and 300 mm Compatibility
Introduction de produit
The wafer storage cabinet is arranged around sealed transparent compartments, adjustable shelves and a common dry-gas distribution system. Each chamber provides direct visual inventory checking while limiting the exposure of other stored lots when one door is opened. Stainless steel door frames, compression latches and cleanable internal surfaces support semiconductor storage areas where moisture, particles and handling discipline must be controlled.
Key Features
A distribution plenum delivers dry nitrogen to the cabinet through controlled inlet connections.
Transparent static-dissipative panel options improve visibility while supporting electrostatic-control practices.
Adjustable shelves accommodate common 200 mm and 300 mm wafer lot-box formats.
Préoccupations du client produit
Stored wafer lots need protection from ambient humidity and particles without making identification or retrieval unnecessarily difficult.
Opening a large shared cabinet exposes every stored lot to room air.Individually sealed compartments isolate the accessed wafer box from adjacent storage positions.
Uneven purge flow leaves some cabinet areas slower to reach the required humidity.A dedicated distribution plenum and chamber inlets promote consistent dry-gas delivery.
Operators cannot confirm inventory without repeatedly opening opaque doors.Clear chamber panels allow rapid visual checks while the compartment remains closed.
Fixed shelf spacing wastes capacity when wafer-box formats change.Adjustable clean shelves can be positioned around the selected 200 mm or 300 mm containers.
Les applications typiques
Semiconductor wafer lot bufferingPre-process wafer box storageMetrology and inspection areasDry storage between fabrication steps
Paramètres techniques
Typical construction values for a multi-chamber wafer storage cabinet are shown below.
| Matériaux de base | 304 stainless steel frame with clear acrylic or static-dissipative PVC chamber panels |
|---|---|
| Panneau épaisseur | 6-10 mm transparent chamber panels |
| Largeur effective | 500-1400 mm cabinet width |
| Longueur maximale | Jusqu'à 2200 mm de hauteur de cabinet |
| Acier face épaisseur | 1.0-1.5 mm stainless steel frame and base panels |
| Densité Core | 1180-1420 kg/m³ for polymer panels and 7850-8000 kg/m³ for stainless components |
| Conductivité thermique | 0.19-0.21 W/(m·K) for clear acrylic panels |
| surface finie | Clear polished chamber panels with brushed stainless steel frames and shelves |
| Type joint | Gasketed hinged chamber doors with compression latches and plenum-fed purge connections |
| Customisation | Disponible en fonction de l'application prévue et de l'environnement d'exploitation. |
Options disponibles
Static-dissipative PVC chambersRégulateur d'humidité automatiqueIndependent chamber flow adjustmentWafer-box-specific shelf layouts
Planning a Wafer Storage Cabinet specification?
Envoyez-nous vos dimensions, conditions d'installation, objectifs de performance et finition de surface requise.
