Wafer storage cabinet in complete three-quarter view with sealed transparent chambers

業界特有のクリーンルーム機器

ウェーハ収納キャビネット

A sealed multi-chamber cabinet that stores wafer boxes in a clean, dry and visible environment with configurable nitrogen purge control.

Sealed Wafer Storage
Controlled Nitrogen Purge
Independent Clear Chambers
200 mm and 300 mm Compatibility

見積もりリクエスト製品案内

商品紹介

The wafer storage cabinet is arranged around sealed transparent compartments, adjustable shelves and a common dry-gas distribution system. Each chamber provides direct visual inventory checking while limiting the exposure of other stored lots when one door is opened. Stainless steel door frames, compression latches and cleanable internal surfaces support semiconductor storage areas where moisture, particles and handling discipline must be controlled.

主要な特徴

Individually accessed chambers reduce disturbance to wafer boxes stored in adjacent compartments.

A distribution plenum delivers dry nitrogen to the cabinet through controlled inlet connections.

Transparent static-dissipative panel options improve visibility while supporting electrostatic-control practices.

Adjustable shelves accommodate common 200 mm and 300 mm wafer lot-box formats.

お客様の製品に関する懸念事項

Stored wafer lots need protection from ambient humidity and particles without making identification or retrieval unnecessarily difficult.

Opening a large shared cabinet exposes every stored lot to room air.Individually sealed compartments isolate the accessed wafer box from adjacent storage positions.

Uneven purge flow leaves some cabinet areas slower to reach the required humidity.A dedicated distribution plenum and chamber inlets promote consistent dry-gas delivery.

Operators cannot confirm inventory without repeatedly opening opaque doors.Clear chamber panels allow rapid visual checks while the compartment remains closed.

Fixed shelf spacing wastes capacity when wafer-box formats change.Adjustable clean shelves can be positioned around the selected 200 mm or 300 mm containers.

典型的な用途

Semiconductor wafer lot bufferingPre-process wafer box storageMetrology and inspection areasDry storage between fabrication steps

技術的なパラメータ

Typical construction values for a multi-chamber wafer storage cabinet are shown below.

コア材料	304 stainless steel frame with clear acrylic or static-dissipative PVC chamber panels
パネルの厚さ	6-10 mm transparent chamber panels
有効幅	500-1400 mm cabinet width
最大長さ	最大 2200 mm キャビネット高さ
鋼鉄の厚さを直面する	1.0-1.5 mm stainless steel frame and base panels
コア密度	1180-1420 kg/m³ for polymer panels and 7850-8000 kg/m³ for stainless components
熱伝導率	0.19-0.21 W/(m·K) for clear acrylic panels
表面仕上げ	Clear polished chamber panels with brushed stainless steel frames and shelves
ジョイントタイプ	Gasketed hinged chamber doors with compression latches and plenum-fed purge connections
カスタマイズ	意図したアプリケーションと動作環境に基づいて利用できます。

利用可能なオプション

Static-dissipative PVC chambers自動湿度コントローラーIndependent chamber flow adjustmentWafer-box-specific shelf layouts

Planning a Wafer Storage Cabinet specification?

寸法、設置条件、性能目標、必要な表面仕上げをお送りください。

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