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Gabinete de almacenamiento Wafer
A sealed multi-chamber cabinet that stores wafer boxes in a clean, dry and visible environment with configurable nitrogen purge control.
- Sealed Wafer Storage
- Controlled Nitrogen Purge
- Independent Clear Chambers
- 200 mm and 300 mm Compatibility
Introducción del producto
The wafer storage cabinet is arranged around sealed transparent compartments, adjustable shelves and a common dry-gas distribution system. Each chamber provides direct visual inventory checking while limiting the exposure of other stored lots when one door is opened. Stainless steel door frames, compression latches and cleanable internal surfaces support semiconductor storage areas where moisture, particles and handling discipline must be controlled.
Características clave
A distribution plenum delivers dry nitrogen to the cabinet through controlled inlet connections.
Transparent static-dissipative panel options improve visibility while supporting electrostatic-control practices.
Adjustable shelves accommodate common 200 mm and 300 mm wafer lot-box formats.
Preocupaciones del producto del cliente
Stored wafer lots need protection from ambient humidity and particles without making identification or retrieval unnecessarily difficult.
Opening a large shared cabinet exposes every stored lot to room air.Individually sealed compartments isolate the accessed wafer box from adjacent storage positions.
Uneven purge flow leaves some cabinet areas slower to reach the required humidity.A dedicated distribution plenum and chamber inlets promote consistent dry-gas delivery.
Operators cannot confirm inventory without repeatedly opening opaque doors.Clear chamber panels allow rapid visual checks while the compartment remains closed.
Fixed shelf spacing wastes capacity when wafer-box formats change.Adjustable clean shelves can be positioned around the selected 200 mm or 300 mm containers.
Aplicaciones típicas
Semiconductor wafer lot bufferingPre-process wafer box storageMetrology and inspection areasDry storage between fabrication steps
Parámetros técnicos
Typical construction values for a multi-chamber wafer storage cabinet are shown below.
| Materiales Core | 304 stainless steel frame with clear acrylic or static-dissipative PVC chamber panels |
|---|---|
| Panel de espesor | 6-10 mm transparent chamber panels |
| Ancho efectivo | 500-1400 mm cabinet width |
| Longitud máxima | Hasta 2200 mm de altura del gabinete |
| Acero frente a espesor | 1.0-1.5 mm stainless steel frame and base panels |
| Densidad Core | 1180-1420 kg/m³ for polymer panels and 7850-8000 kg/m³ for stainless components |
| Conductividad térmica | 0.19-0.21 W/(m·K) for clear acrylic panels |
| Superficie acabada | Clear polished chamber panels with brushed stainless steel frames and shelves |
| Tipo conjunto | Gasketed hinged chamber doors with compression latches and plenum-fed purge connections |
| Customization | Disponible según la aplicación prevista y el entorno operativo. |
Opciones disponibles
Static-dissipative PVC chambersControlador automático de humedadIndependent chamber flow adjustmentWafer-box-specific shelf layouts
Planning a Wafer Storage Cabinet specification?
Envíenos sus dimensiones, condiciones de instalación, objetivos de rendimiento y acabado superficial requerido.
