Wafer storage cabinet in complete three-quarter view with sealed transparent chambers

산업별 클린룸 장비

웨이퍼 저장 캐비닛

A sealed multi-chamber cabinet that stores wafer boxes in a clean, dry and visible environment with configurable nitrogen purge control.

Sealed Wafer Storage
Controlled Nitrogen Purge
Independent Clear Chambers
200 mm and 300 mm Compatibility

견적 요청 제품 찾아보기

상품 소개

The wafer storage cabinet is arranged around sealed transparent compartments, adjustable shelves and a common dry-gas distribution system. Each chamber provides direct visual inventory checking while limiting the exposure of other stored lots when one door is opened. Stainless steel door frames, compression latches and cleanable internal surfaces support semiconductor storage areas where moisture, particles and handling discipline must be controlled.

주요 기능

Individually accessed chambers reduce disturbance to wafer boxes stored in adjacent compartments.

A distribution plenum delivers dry nitrogen to the cabinet through controlled inlet connections.

Transparent static-dissipative panel options improve visibility while supporting electrostatic-control practices.

Adjustable shelves accommodate common 200 mm and 300 mm wafer lot-box formats.

고객 제품 관심사

Stored wafer lots need protection from ambient humidity and particles without making identification or retrieval unnecessarily difficult.

Opening a large shared cabinet exposes every stored lot to room air.Individually sealed compartments isolate the accessed wafer box from adjacent storage positions.

Uneven purge flow leaves some cabinet areas slower to reach the required humidity.A dedicated distribution plenum and chamber inlets promote consistent dry-gas delivery.

Operators cannot confirm inventory without repeatedly opening opaque doors.Clear chamber panels allow rapid visual checks while the compartment remains closed.

Fixed shelf spacing wastes capacity when wafer-box formats change.Adjustable clean shelves can be positioned around the selected 200 mm or 300 mm containers.

일반적인 응용 프로그램

Semiconductor wafer lot bufferingPre-process wafer box storageMetrology and inspection areasDry storage between fabrication steps

기술 매개변수

Typical construction values for a multi-chamber wafer storage cabinet are shown below.

핵심 재료	304 stainless steel frame with clear acrylic or static-dissipative PVC chamber panels
패널 두께	6-10 mm transparent chamber panels
유효 폭	500-1400 mm cabinet width
최대 길이	캐비닛 높이 최대 2200 mm
강철 면면 두께	1.0-1.5 mm stainless steel frame and base panels
코어 밀도	1180-1420 kg/m³ for polymer panels and 7850-8000 kg/m³ for stainless components
열전도도 (Thermal Conductivity)	0.19-0.21 W/(m·K) for clear acrylic panels
표면 마무리	Clear polished chamber panels with brushed stainless steel frames and shelves
접합 유형	Gasketed hinged chamber doors with compression latches and plenum-fed purge connections
사용자 정의	의도된 응용 프로그램 및 운영 환경에 따라 사용할 수 있습니다.

사용 가능한 옵션

Static-dissipative PVC chambers자동 습도 제어기Independent chamber flow adjustmentWafer-box-specific shelf layouts

Planning a Wafer Storage Cabinet specification?

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