Industry-Specific Cleanroom Equipment

AMC Filtration System

A modular recirculation or make-up-air filtration cabinet that controls semiconductor airborne molecular contaminants through selected media banks and monitored airflow.

Multi-Stage Molecular Media
Acid Base and Organic Control
Monitored Filter Pressure
Modular Service Banks

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Product Introduction

The AMC filtration system combines particulate prefiltration, dedicated molecular-media banks, fans and condition-monitoring points in a serviceable stainless enclosure. Media chemistry is selected around the contaminant challenge rather than treated as a universal carbon stage. Separate banks can address acids, bases, organics or dopant compounds, while pressure taps and sampling ports support filter-life assessment and downstream air verification.

Key Features

Independent media banks allow different adsorbents to be arranged for the target AMC families.

Upstream particulate filters protect molecular media from dust loading and surface blockage.

Differential-pressure and sampling points provide evidence for maintenance and media-life decisions.

Modular front service access permits cassette replacement without dismantling the complete air system.

Customer Product Concerns

Advanced semiconductor processes require molecular contamination control tailored to local chemistry, airflow and exposure limits.

Acids, bases, dopants and VOCs do not respond equally to one adsorbent.Separate media banks use chemistry selected for each target contaminant family.

Particle loading can consume media surface and increase pressure loss.Dedicated prefilters remove particulate matter before air reaches molecular stages.

Calendar-based replacement discards useful media or leaves exhausted filters in service.Sampling ports and pressure monitoring support condition-based maintenance decisions.

Large filter banks create long service interruptions.Front-access cassettes and isolated banks shorten replacement and allow staged maintenance.

Typical Applications

Semiconductor cleanroom recirculation airPhotolithography AMC controlProcess-tool and wafer-storage protectionMake-up-air molecular filtration

Technical Parameters

Typical construction values for a modular semiconductor AMC filtration cabinet are listed below.

Core Material	304 stainless steel enclosure with low-outgassing particulate filters and selected molecular adsorbent media
Panel Thickness	40-80 mm double-wall service panels
Effective Width	1200-3000 mm system width
Maximum Length	Up to 6000 mm modular system length
Steel Facing Thickness	1.0-1.5 mm stainless steel inner and outer panels
Core Density	350-650 kg/m³ for packed molecular media cassettes
Thermal Conductivity	14-17 W/(m·K) for stainless cabinet components
Surface Finish	Brushed stainless steel with smooth low-outgassing internal surfaces
Joint Type	Gasketed modular casing with clamped filter tracks, sealed service doors and flanged duct connections
Customization	Available based on the intended application and operating environment.

Available Options

Acid, base, organic and dopant media banksRecirculation or make-up-air configurationRedundant EC fan arraysAMC sampling and remote monitoring

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