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معدات الغرف النظيفة المحددة للصناعة
AMC
A modular recirculation or make-up-air filtration cabinet that controls semiconductor airborne molecular contaminants through selected media banks and monitored airflow.
- Multi-Stage Molecular Media
- Acid Base and Organic Control
- Monitored Filter Pressure
- Modular Service Banks
مقدمة المنتج
The AMC filtration system combines particulate prefiltration, dedicated molecular-media banks, fans and condition-monitoring points in a serviceable stainless enclosure. Media chemistry is selected around the contaminant challenge rather than treated as a universal carbon stage. Separate banks can address acids, bases, organics or dopant compounds, while pressure taps and sampling ports support filter-life assessment and downstream air verification.
الخصائص الرئيسية
Upstream particulate filters protect molecular media from dust loading and surface blockage.
Differential-pressure and sampling points provide evidence for maintenance and media-life decisions.
Modular front service access permits cassette replacement without dismantling the complete air system.
مخاوف المنتج للعملاء
Advanced semiconductor processes require molecular contamination control tailored to local chemistry, airflow and exposure limits.
Acids, bases, dopants and VOCs do not respond equally to one adsorbent.Separate media banks use chemistry selected for each target contaminant family.
Particle loading can consume media surface and increase pressure loss.Dedicated prefilters remove particulate matter before air reaches molecular stages.
Calendar-based replacement discards useful media or leaves exhausted filters in service.Sampling ports and pressure monitoring support condition-based maintenance decisions.
Large filter banks create long service interruptions.Front-access cassettes and isolated banks shorten replacement and allow staged maintenance.
تطبيقات نموذجية
Semiconductor cleanroom recirculation airPhotolithography AMC controlProcess-tool and wafer-storage protectionMake-up-air molecular filtration
المعلمات الفنية
Typical construction values for a modular semiconductor AMC filtration cabinet are listed below.
| المواد الأساسية | 304 stainless steel enclosure with low-outgassing particulate filters and selected molecular adsorbent media |
|---|---|
| سمك اللوحة | 40-80 mm double-wall service panels |
| العرض الفعال | 1200-3000 mm system width |
| الحد الأقصى الطول | Up to 6000 mm modular system length |
| الصلب يواجه سمك | 1.0-1.5 mm stainless steel inner and outer panels |
| الكثافة الأساسية | 350-650 kg/m³ for packed molecular media cassettes |
| الموصلية الحرارية | 14-17 W/(m·K) for stainless cabinet components |
| إنهاء السطح | Brushed stainless steel with smooth low-outgassing internal surfaces |
| نوع المشترك | Gasketed modular casing with clamped filter tracks, sealed service doors and flanged duct connections |
| التخصيص | متوفر على أساس التطبيق المقصود وبيئة التشغيل. |
الخيارات المتاحة
Acid, base, organic and dopant media banksRecirculation or make-up-air configurationRedundant EC fan arraysAMC sampling and remote monitoring
Planning a AMC Filtration System specification?
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