AMC filtration system in complete three-quarter view with molecular media banks

산업별 클린룸 장비

AMC 필터링 시스템

A modular recirculation or make-up-air filtration cabinet that controls semiconductor airborne molecular contaminants through selected media banks and monitored airflow.

Multi-Stage Molecular Media
Acid Base and Organic Control
Monitored Filter Pressure
Modular Service Banks

견적 요청 제품 찾아보기

상품 소개

The AMC filtration system combines particulate prefiltration, dedicated molecular-media banks, fans and condition-monitoring points in a serviceable stainless enclosure. Media chemistry is selected around the contaminant challenge rather than treated as a universal carbon stage. Separate banks can address acids, bases, organics or dopant compounds, while pressure taps and sampling ports support filter-life assessment and downstream air verification.

주요 기능

Independent media banks allow different adsorbents to be arranged for the target AMC families.

Upstream particulate filters protect molecular media from dust loading and surface blockage.

Differential-pressure and sampling points provide evidence for maintenance and media-life decisions.

Modular front service access permits cassette replacement without dismantling the complete air system.

고객 제품 관심사

Advanced semiconductor processes require molecular contamination control tailored to local chemistry, airflow and exposure limits.

Acids, bases, dopants and VOCs do not respond equally to one adsorbent.Separate media banks use chemistry selected for each target contaminant family.

Particle loading can consume media surface and increase pressure loss.Dedicated prefilters remove particulate matter before air reaches molecular stages.

Calendar-based replacement discards useful media or leaves exhausted filters in service.Sampling ports and pressure monitoring support condition-based maintenance decisions.

Large filter banks create long service interruptions.Front-access cassettes and isolated banks shorten replacement and allow staged maintenance.

일반적인 응용 프로그램

Semiconductor cleanroom recirculation airPhotolithography AMC controlProcess-tool and wafer-storage protectionMake-up-air molecular filtration

기술 매개변수

Typical construction values for a modular semiconductor AMC filtration cabinet are listed below.

핵심 재료	304 stainless steel enclosure with low-outgassing particulate filters and selected molecular adsorbent media
패널 두께	40-80 mm double-wall service panels
유효 폭	1200-3000 mm system width
최대 길이	Up to 6000 mm modular system length
강철 면면 두께	1.0-1.5 mm stainless steel inner and outer panels
코어 밀도	350-650 kg/m³ for packed molecular media cassettes
열전도도 (Thermal Conductivity)	14-17 W/(m·K) for stainless cabinet components
표면 마무리	Brushed stainless steel with smooth low-outgassing internal surfaces
접합 유형	Gasketed modular casing with clamped filter tracks, sealed service doors and flanged duct connections
사용자 정의	의도된 응용 프로그램 및 운영 환경에 따라 사용할 수 있습니다.

사용 가능한 옵션

Acid, base, organic and dopant media banksRecirculation or make-up-air configurationRedundant EC fan arraysAMC sampling and remote monitoring

Planning a AMC Filtration System specification?

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