AMC filtration system in complete three-quarter view with molecular media banks

業界特有のクリーンルーム機器

AMC ろ過システム

A modular recirculation or make-up-air filtration cabinet that controls semiconductor airborne molecular contaminants through selected media banks and monitored airflow.

Multi-Stage Molecular Media
Acid Base and Organic Control
Monitored Filter Pressure
Modular Service Banks

見積もりリクエスト製品案内

商品紹介

The AMC filtration system combines particulate prefiltration, dedicated molecular-media banks, fans and condition-monitoring points in a serviceable stainless enclosure. Media chemistry is selected around the contaminant challenge rather than treated as a universal carbon stage. Separate banks can address acids, bases, organics or dopant compounds, while pressure taps and sampling ports support filter-life assessment and downstream air verification.

主要な特徴

Independent media banks allow different adsorbents to be arranged for the target AMC families.

Upstream particulate filters protect molecular media from dust loading and surface blockage.

Differential-pressure and sampling points provide evidence for maintenance and media-life decisions.

Modular front service access permits cassette replacement without dismantling the complete air system.

お客様の製品に関する懸念事項

Advanced semiconductor processes require molecular contamination control tailored to local chemistry, airflow and exposure limits.

Acids, bases, dopants and VOCs do not respond equally to one adsorbent.Separate media banks use chemistry selected for each target contaminant family.

Particle loading can consume media surface and increase pressure loss.Dedicated prefilters remove particulate matter before air reaches molecular stages.

Calendar-based replacement discards useful media or leaves exhausted filters in service.Sampling ports and pressure monitoring support condition-based maintenance decisions.

Large filter banks create long service interruptions.Front-access cassettes and isolated banks shorten replacement and allow staged maintenance.

典型的な用途

Semiconductor cleanroom recirculation airPhotolithography AMC controlProcess-tool and wafer-storage protectionMake-up-air molecular filtration

技術的なパラメータ

Typical construction values for a modular semiconductor AMC filtration cabinet are listed below.

コア材料	304 stainless steel enclosure with low-outgassing particulate filters and selected molecular adsorbent media
パネルの厚さ	40-80 mm double-wall service panels
有効幅	1200-3000 mm system width
最大長さ	Up to 6000 mm modular system length
鋼鉄の厚さを直面する	1.0-1.5 mm stainless steel inner and outer panels
コア密度	350-650 kg/m³ for packed molecular media cassettes
熱伝導率	14-17 W/(m·K) for stainless cabinet components
表面仕上げ	Brushed stainless steel with smooth low-outgassing internal surfaces
ジョイントタイプ	Gasketed modular casing with clamped filter tracks, sealed service doors and flanged duct connections
カスタマイズ	意図したアプリケーションと動作環境に基づいて利用できます。

利用可能なオプション

Acid, base, organic and dopant media banksRecirculation or make-up-air configurationRedundant EC fan arraysAMC sampling and remote monitoring

Planning a AMC Filtration System specification?

寸法、設置条件、性能目標、必要な表面仕上げをお送りください。

チームに相談する