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Equipos de sala limpia específicos de la industria
Sistema de filtración AMC
A modular recirculation or make-up-air filtration cabinet that controls semiconductor airborne molecular contaminants through selected media banks and monitored airflow.
- Multi-Stage Molecular Media
- Acid Base and Organic Control
- Monitored Filter Pressure
- Modular Service Banks
Introducción del producto
The AMC filtration system combines particulate prefiltration, dedicated molecular-media banks, fans and condition-monitoring points in a serviceable stainless enclosure. Media chemistry is selected around the contaminant challenge rather than treated as a universal carbon stage. Separate banks can address acids, bases, organics or dopant compounds, while pressure taps and sampling ports support filter-life assessment and downstream air verification.
Características clave
Upstream particulate filters protect molecular media from dust loading and surface blockage.
Differential-pressure and sampling points provide evidence for maintenance and media-life decisions.
Modular front service access permits cassette replacement without dismantling the complete air system.
Preocupaciones del producto del cliente
Advanced semiconductor processes require molecular contamination control tailored to local chemistry, airflow and exposure limits.
Acids, bases, dopants and VOCs do not respond equally to one adsorbent.Separate media banks use chemistry selected for each target contaminant family.
Particle loading can consume media surface and increase pressure loss.Dedicated prefilters remove particulate matter before air reaches molecular stages.
Calendar-based replacement discards useful media or leaves exhausted filters in service.Sampling ports and pressure monitoring support condition-based maintenance decisions.
Large filter banks create long service interruptions.Front-access cassettes and isolated banks shorten replacement and allow staged maintenance.
Aplicaciones típicas
Semiconductor cleanroom recirculation airPhotolithography AMC controlProcess-tool and wafer-storage protectionMake-up-air molecular filtration
Parámetros técnicos
Typical construction values for a modular semiconductor AMC filtration cabinet are listed below.
| Materiales Core | 304 stainless steel enclosure with low-outgassing particulate filters and selected molecular adsorbent media |
|---|---|
| Panel de espesor | 40-80 mm double-wall service panels |
| Ancho efectivo | 1200-3000 mm system width |
| Longitud máxima | Up to 6000 mm modular system length |
| Acero frente a espesor | 1.0-1.5 mm stainless steel inner and outer panels |
| Densidad Core | 350-650 kg/m³ for packed molecular media cassettes |
| Conductividad térmica | 14-17 W/(m·K) for stainless cabinet components |
| Superficie acabada | Brushed stainless steel with smooth low-outgassing internal surfaces |
| Tipo conjunto | Gasketed modular casing with clamped filter tracks, sealed service doors and flanged duct connections |
| Customization | Disponible según la aplicación prevista y el entorno operativo. |
Opciones disponibles
Acid, base, organic and dopant media banksRecirculation or make-up-air configurationRedundant EC fan arraysAMC sampling and remote monitoring
Planning a AMC Filtration System specification?
Envíenos sus dimensiones, condiciones de instalación, objetivos de rendimiento y acabado superficial requerido.
