AMC filtration system in complete three-quarter view with molecular media banks

Equipamento de sala limpa específico da indústria

Sistema de filtragem AMC

A modular recirculation or make-up-air filtration cabinet that controls semiconductor airborne molecular contaminants through selected media banks and monitored airflow.

Multi-Stage Molecular Media
Acid Base and Organic Control
Monitored Filter Pressure
Modular Service Banks

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Introdução do produto

The AMC filtration system combines particulate prefiltration, dedicated molecular-media banks, fans and condition-monitoring points in a serviceable stainless enclosure. Media chemistry is selected around the contaminant challenge rather than treated as a universal carbon stage. Separate banks can address acids, bases, organics or dopant compounds, while pressure taps and sampling ports support filter-life assessment and downstream air verification.

Características-chave

Independent media banks allow different adsorbents to be arranged for the target AMC families.

Upstream particulate filters protect molecular media from dust loading and surface blockage.

Differential-pressure and sampling points provide evidence for maintenance and media-life decisions.

Modular front service access permits cassette replacement without dismantling the complete air system.

Preocupações do produto do cliente

Advanced semiconductor processes require molecular contamination control tailored to local chemistry, airflow and exposure limits.

Acids, bases, dopants and VOCs do not respond equally to one adsorbent.Separate media banks use chemistry selected for each target contaminant family.

Particle loading can consume media surface and increase pressure loss.Dedicated prefilters remove particulate matter before air reaches molecular stages.

Calendar-based replacement discards useful media or leaves exhausted filters in service.Sampling ports and pressure monitoring support condition-based maintenance decisions.

Large filter banks create long service interruptions.Front-access cassettes and isolated banks shorten replacement and allow staged maintenance.

Aplicações típicas

Semiconductor cleanroom recirculation airPhotolithography AMC controlProcess-tool and wafer-storage protectionMake-up-air molecular filtration

Parâmetros técnicos

Typical construction values for a modular semiconductor AMC filtration cabinet are listed below.

Material principal	304 stainless steel enclosure with low-outgassing particulate filters and selected molecular adsorbent media
Painel de espessura	40-80 mm double-wall service panels
Largura efetiva	1200-3000 mm system width
Comprimento máximo	Up to 6000 mm modular system length
Aço enfrentando espessura	1.0-1.5 mm stainless steel inner and outer panels
Densidade Core	350-650 kg/m³ for packed molecular media cassettes
Condutividade térmica	14-17 W/(m·K) for stainless cabinet components
Superfície acabado	Brushed stainless steel with smooth low-outgassing internal surfaces
Tipo conjunto	Gasketed modular casing with clamped filter tracks, sealed service doors and flanged duct connections
Customização	Disponível com base na aplicação pretendida e no ambiente operacional.

Opções disponíveis

Acid, base, organic and dopant media banksRecirculation or make-up-air configurationRedundant EC fan arraysAMC sampling and remote monitoring

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