AMC filtration system in complete three-quarter view with molecular media banks

Branchenspezifische Reinraumausrüstung

AMC Filtrationssystem

A modular recirculation or make-up-air filtration cabinet that controls semiconductor airborne molecular contaminants through selected media banks and monitored airflow.

Multi-Stage Molecular Media
Acid Base and Organic Control
Monitored Filter Pressure
Modular Service Banks

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Produkteinführung

The AMC filtration system combines particulate prefiltration, dedicated molecular-media banks, fans and condition-monitoring points in a serviceable stainless enclosure. Media chemistry is selected around the contaminant challenge rather than treated as a universal carbon stage. Separate banks can address acids, bases, organics or dopant compounds, while pressure taps and sampling ports support filter-life assessment and downstream air verification.

Key Features

Independent media banks allow different adsorbents to be arranged for the target AMC families.

Upstream particulate filters protect molecular media from dust loading and surface blockage.

Differential-pressure and sampling points provide evidence for maintenance and media-life decisions.

Modular front service access permits cassette replacement without dismantling the complete air system.

Kunden Produktbedenken

Advanced semiconductor processes require molecular contamination control tailored to local chemistry, airflow and exposure limits.

Acids, bases, dopants and VOCs do not respond equally to one adsorbent.Separate media banks use chemistry selected for each target contaminant family.

Particle loading can consume media surface and increase pressure loss.Dedicated prefilters remove particulate matter before air reaches molecular stages.

Calendar-based replacement discards useful media or leaves exhausted filters in service.Sampling ports and pressure monitoring support condition-based maintenance decisions.

Large filter banks create long service interruptions.Front-access cassettes and isolated banks shorten replacement and allow staged maintenance.

Typische Anwendungen

Semiconductor cleanroom recirculation airPhotolithography AMC controlProcess-tool and wafer-storage protectionMake-up-air molecular filtration

Technische Parameter

Typical construction values for a modular semiconductor AMC filtration cabinet are listed below.

Core Material	304 stainless steel enclosure with low-outgassing particulate filters and selected molecular adsorbent media
Panel Dicke	40-80 mm double-wall service panels
Effektive Breite	1200-3000 mm system width
Maximale Länge	Up to 6000 mm modular system length
Stahl facing Dicke	1.0-1.5 mm stainless steel inner and outer panels
Kerndichte	350-650 kg/m³ for packed molecular media cassettes
Thermische Leitfähigkeit	14-17 W/(m·K) for stainless cabinet components
Oberfläche Finish	Brushed stainless steel with smooth low-outgassing internal surfaces
Gemeinsamer Typ	Gasketed modular casing with clamped filter tracks, sealed service doors and flanged duct connections
Customisierung	Verfügbar je nach beabsichtigter Anwendung und Betriebsumgebung.

Verfügbare Optionen

Acid, base, organic and dopant media banksRecirculation or make-up-air configurationRedundant EC fan arraysAMC sampling and remote monitoring

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