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Equipement de salle blanche spécifique à l'industrie
Système de filtration AMC
A modular recirculation or make-up-air filtration cabinet that controls semiconductor airborne molecular contaminants through selected media banks and monitored airflow.
- Multi-Stage Molecular Media
- Acid Base and Organic Control
- Monitored Filter Pressure
- Modular Service Banks
Introduction de produit
The AMC filtration system combines particulate prefiltration, dedicated molecular-media banks, fans and condition-monitoring points in a serviceable stainless enclosure. Media chemistry is selected around the contaminant challenge rather than treated as a universal carbon stage. Separate banks can address acids, bases, organics or dopant compounds, while pressure taps and sampling ports support filter-life assessment and downstream air verification.
Key Features
Upstream particulate filters protect molecular media from dust loading and surface blockage.
Differential-pressure and sampling points provide evidence for maintenance and media-life decisions.
Modular front service access permits cassette replacement without dismantling the complete air system.
Préoccupations du client produit
Advanced semiconductor processes require molecular contamination control tailored to local chemistry, airflow and exposure limits.
Acids, bases, dopants and VOCs do not respond equally to one adsorbent.Separate media banks use chemistry selected for each target contaminant family.
Particle loading can consume media surface and increase pressure loss.Dedicated prefilters remove particulate matter before air reaches molecular stages.
Calendar-based replacement discards useful media or leaves exhausted filters in service.Sampling ports and pressure monitoring support condition-based maintenance decisions.
Large filter banks create long service interruptions.Front-access cassettes and isolated banks shorten replacement and allow staged maintenance.
Les applications typiques
Semiconductor cleanroom recirculation airPhotolithography AMC controlProcess-tool and wafer-storage protectionMake-up-air molecular filtration
Paramètres techniques
Typical construction values for a modular semiconductor AMC filtration cabinet are listed below.
| Matériaux de base | 304 stainless steel enclosure with low-outgassing particulate filters and selected molecular adsorbent media |
|---|---|
| Panneau épaisseur | 40-80 mm double-wall service panels |
| Largeur effective | 1200-3000 mm system width |
| Longueur maximale | Up to 6000 mm modular system length |
| Acier face épaisseur | 1.0-1.5 mm stainless steel inner and outer panels |
| Densité Core | 350-650 kg/m³ for packed molecular media cassettes |
| Conductivité thermique | 14-17 W/(m·K) for stainless cabinet components |
| surface finie | Brushed stainless steel with smooth low-outgassing internal surfaces |
| Type joint | Gasketed modular casing with clamped filter tracks, sealed service doors and flanged duct connections |
| Customisation | Disponible en fonction de l'application prévue et de l'environnement d'exploitation. |
Options disponibles
Acid, base, organic and dopant media banksRecirculation or make-up-air configurationRedundant EC fan arraysAMC sampling and remote monitoring
Planning a AMC Filtration System specification?
Envoyez-nous vos dimensions, conditions d'installation, objectifs de performance et finition de surface requise.
