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Industry-Specific Cleanroom Equipment
Chemical Filter FFU
A ceiling or mini-environment fan-filter unit that combines gas-phase chemical media with final particulate filtration for localized AMC control.
- Gas-Phase Chemical Filtration
- Integrated EC Fan
- Final Particulate Filter
- Replaceable Media Cassettes
Product Introduction
The chemical filter FFU draws return or room air through selected gas-phase media before delivering it through a final particulate filter and uniform diffuser. Activated carbon, impregnated media or blended chemisorbents can be selected around the target airborne molecular contaminant. A compact EC fan and modular media drawer support local installation above semiconductor mini-environments, sensitive process zones or ceiling-grid positions.
Key Features
A final particulate filter captures media dust and airborne particles before supply air enters the protected zone.
EC fan control provides adjustable airflow for pressure balancing and filter loading compensation.
Service drawers allow chemical-media replacement without dismantling the complete unit housing.
Customer Product Concerns
Sensitive semiconductor processes need control of molecular contaminants as well as particles, often within a limited ceiling or tool-envelope depth.
A conventional HEPA FFU does not remove gases or airborne molecular contaminants.Dedicated adsorbent and chemisorbent stages remove target molecular species before final filtration.
One universal carbon grade cannot efficiently address every contaminant family.Modular cassettes allow media chemistry to be selected for acids, bases, organics or dopants.
Media replacement can interrupt the protected process zone.Accessible service drawers shorten change time and keep the fan/filter housing installed.
Rising filter resistance reduces airflow over time.Adjustable EC fan control restores the required flow within the equipment operating range.
Typical Applications
Semiconductor mini-environmentsPhotolithography process areasChemical-sensitive metrology zonesLocalized AMC control above wafer handling
Technical Parameters
Typical construction values for a compact chemical-filter fan-filter unit are shown below.
| Core Material | Galvanized or stainless steel housing with activated-carbon or impregnated chemisorbent media |
|---|---|
| Panel Thickness | 100-450 mm overall equipment depth |
| Effective Width | 575-1220 mm nominal module width |
| Maximum Length | Up to 1220 mm module length |
| Steel Facing Thickness | 0.8-1.2 mm metal housing panels |
| Core Density | 350-650 kg/m³ for packed chemical media cassettes |
| Thermal Conductivity | 14-17 W/(m·K) for stainless housing components |
| Surface Finish | Brushed stainless steel or cleanroom-grade powder-coated metal housing |
| Joint Type | Gasketed filter seats with latched chemical-media drawer and bolted fan housing |
| Customization | Available based on the intended application and operating environment. |
Available Options
Acid, base, organic or dopant mediaHEPA or ULPA final filterLocal, analog or network fan controlCeiling-grid or mini-environment mounting
Planning a Chemical Filter FFU specification?
Send us your dimensions, installation conditions, performance targets and required surface finish.
