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Оборудование для чистых помещений
Химический фильтр FFU
A ceiling or mini-environment fan-filter unit that combines gas-phase chemical media with final particulate filtration for localized AMC control.
- Gas-Phase Chemical Filtration
- Integrated EC Fan
- Final Particulate Filter
- Replaceable Media Cassettes
Введение продукции
The chemical filter FFU draws return or room air through selected gas-phase media before delivering it through a final particulate filter and uniform diffuser. Activated carbon, impregnated media or blended chemisorbents can be selected around the target airborne molecular contaminant. A compact EC fan and modular media drawer support local installation above semiconductor mini-environments, sensitive process zones or ceiling-grid positions.
Основные характеристики
A final particulate filter captures media dust and airborne particles before supply air enters the protected zone.
EC fan control provides adjustable airflow for pressure balancing and filter loading compensation.
Service drawers allow chemical-media replacement without dismantling the complete unit housing.
Обеспокоенность клиентов продуктами
Sensitive semiconductor processes need control of molecular contaminants as well as particles, often within a limited ceiling or tool-envelope depth.
A conventional HEPA FFU does not remove gases or airborne molecular contaminants.Dedicated adsorbent and chemisorbent stages remove target molecular species before final filtration.
One universal carbon grade cannot efficiently address every contaminant family.Modular cassettes allow media chemistry to be selected for acids, bases, organics or dopants.
Media replacement can interrupt the protected process zone.Accessible service drawers shorten change time and keep the fan/filter housing installed.
Rising filter resistance reduces airflow over time.Adjustable EC fan control restores the required flow within the equipment operating range.
Типичные приложения
Semiconductor mini-environmentsPhotolithography process areasChemical-sensitive metrology zonesLocalized AMC control above wafer handling
Технические параметры
Typical construction values for a compact chemical-filter fan-filter unit are shown below.
| Основной материал | Galvanized or stainless steel housing with activated-carbon or impregnated chemisorbent media |
|---|---|
| Толщина панели | 100-450 mm overall equipment depth |
| эффективная ширина | 575-1220 mm nominal module width |
| Максимальная длина | Up to 1220 mm module length |
| Толщина линий стали | 0.8-1.2 mm metal housing panels |
| Плотность ядра | 350-650 kg/m³ for packed chemical media cassettes |
| Теплопроводимость | 14-17 W/(m·K) for stainless housing components |
| Поверхностная отделка | Brushed stainless steel or cleanroom-grade powder-coated metal housing |
| Объединенный тип | Gasketed filter seats with latched chemical-media drawer and bolted fan housing |
| Customization | Доступно в зависимости от предполагаемого применения и операционной среды. |
Доступные варианты
Acid, base, organic or dopant mediaHEPA or ULPA final filterLocal, analog or network fan controlCeiling-grid or mini-environment mounting
Planning a Chemical Filter FFU specification?
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