영어
독일어
아랍어
프랑스어
인도네시아어
일본어
한국어현재 Current
말레이어
포르투갈어
러시아어
스페인어
태국어
터키어
베트남어
상품 소개
The chemical filter FFU draws return or room air through selected gas-phase media before delivering it through a final particulate filter and uniform diffuser. Activated carbon, impregnated media or blended chemisorbents can be selected around the target airborne molecular contaminant. A compact EC fan and modular media drawer support local installation above semiconductor mini-environments, sensitive process zones or ceiling-grid positions.
주요 기능
A final particulate filter captures media dust and airborne particles before supply air enters the protected zone.
EC fan control provides adjustable airflow for pressure balancing and filter loading compensation.
Service drawers allow chemical-media replacement without dismantling the complete unit housing.
고객 제품 관심사
Sensitive semiconductor processes need control of molecular contaminants as well as particles, often within a limited ceiling or tool-envelope depth.
A conventional HEPA FFU does not remove gases or airborne molecular contaminants.Dedicated adsorbent and chemisorbent stages remove target molecular species before final filtration.
One universal carbon grade cannot efficiently address every contaminant family.Modular cassettes allow media chemistry to be selected for acids, bases, organics or dopants.
Media replacement can interrupt the protected process zone.Accessible service drawers shorten change time and keep the fan/filter housing installed.
Rising filter resistance reduces airflow over time.Adjustable EC fan control restores the required flow within the equipment operating range.
일반적인 응용 프로그램
Semiconductor mini-environmentsPhotolithography process areasChemical-sensitive metrology zonesLocalized AMC control above wafer handling
기술 매개변수
Typical construction values for a compact chemical-filter fan-filter unit are shown below.
| 핵심 재료 | Galvanized or stainless steel housing with activated-carbon or impregnated chemisorbent media |
|---|---|
| 패널 두께 | 100-450 mm overall equipment depth |
| 유효 폭 | 575-1220 mm nominal module width |
| 최대 길이 | Up to 1220 mm module length |
| 강철 면면 두께 | 0.8-1.2 mm metal housing panels |
| 코어 밀도 | 350-650 kg/m³ for packed chemical media cassettes |
| 열전도도 (Thermal Conductivity) | 14-17 W/(m·K) for stainless housing components |
| 표면 마무리 | Brushed stainless steel or cleanroom-grade powder-coated metal housing |
| 접합 유형 | Gasketed filter seats with latched chemical-media drawer and bolted fan housing |
| 사용자 정의 | 의도된 응용 프로그램 및 운영 환경에 따라 사용할 수 있습니다. |
사용 가능한 옵션
Acid, base, organic or dopant mediaHEPA or ULPA final filterLocal, analog or network fan controlCeiling-grid or mini-environment mounting
Planning a Chemical Filter FFU specification?
치수, 설치 조건, 성능 목표 및 필요한 표면 마감을 보내십시오.
