FFU and Terminal Air Purification Equipment

ULPA Fan Filter Unit

A tightly sealed EC fan filter module configured with U15, U16 or U17 mini-pleat media for processes sensitive to ultrafine airborne particles.

U15-U17 Filter Options
Low-Leakage Gel Seal
Stable EC Airflow
Room-Side Service Option

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Product Introduction

This ULPA fan filter unit combines an aluminium mini-pleat ULPA panel, a rigid powder-coated plenum and a backward-curved EC impeller in one ceiling module. A knife-edge gel seal isolates the downstream face from bypass leakage, while the internal pressure chamber distributes air evenly across the high-resistance filter. Individual 0-10 V control or network-ready regulation helps maintain the selected face velocity as filter resistance changes. It is intended for advanced microelectronics, nanotechnology and precision optical environments where an ordinary HEPA configuration may not provide the required particle-retention margin.

Key Features

U15-U17 mini-pleat media provides a higher particulate-retention level than a standard H14 module.

A gel-seal knife edge forms a continuous downstream barrier around the complete filter perimeter.

The EC impeller and pressure chamber maintain uniform discharge without a central high-velocity zone.

Room-side access can keep filter replacement and seal inspection within the controlled space.

Customer Product Concerns

Ultrafine-particle control depends on both the ULPA media and the integrity of the complete fan, plenum and filter interface.

A high-efficiency filter can still allow bypass leakage around a compressed perimeter gasket.The knife-edge housing seats continuously in the gel channel to close the perimeter airflow path.

Dense ULPA media raises resistance and can reduce delivered face velocity as the filter loads.An EC fan with adjustable reserve pressure supports stable airflow through the higher-resistance filter pack.

Uneven plenum pressure creates local velocity peaks over sensitive wafers or optical components.Internal baffling spreads the fan discharge before it reaches the full ULPA filter face.

Removing a ceiling module from above can expose an ultraclean room during maintenance.A room-side replaceable arrangement allows the filter and sealing surface to be serviced from below.

Typical Applications

Semiconductor wafer fabricationAdvanced display manufacturingPrecision optics assemblyNanotechnology research areasCritical mini-environments

Technical Parameters

Representative construction ranges for a ceiling-mounted ULPA fan filter unit are listed below.

Core Material	Low-boron micro-glass or membrane ULPA mini-pleat pack with aluminium separators and EC centrifugal fan
Panel Thickness	330-450 mm overall module depth
Effective Width	575-1170 mm nominal ceiling-grid width
Maximum Length	Up to 1170 mm standard module length
Steel Facing Thickness	0.8-1.2 mm powder-coated steel housing; stainless-steel option available
Core Density	Approximately 90-120 kg/m³ compacted density of the ULPA filter pack
Thermal Conductivity	Approximately 0.035-0.043 W/(m·K) for the high-efficiency micro-glass pack used in the ULPA FFU
Surface Finish	White low-shedding powder coat with anodized aluminium or stainless perforated diffuser
Joint Type	Knife-edge gel-seal filter interface with closed-cell ceiling perimeter gasket
Customization	Available based on the intended application and operating environment.

Available Options

U15, U16 or U17 filter classDry gasket or gel-seal interface0-10 V, Modbus or grouped EC controlTop-side or room-side filter access

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