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УФУ и терминальное оборудование для очистки воздуха
Фильтр вентилятора ULPA
A tightly sealed EC fan filter module configured with U15, U16 or U17 mini-pleat media for processes sensitive to ultrafine airborne particles.
- U15-U17 Filter Options
- Low-Leakage Gel Seal
- Stable EC Airflow
- Room-Side Service Option
Введение продукции
This ULPA fan filter unit combines an aluminium mini-pleat ULPA panel, a rigid powder-coated plenum and a backward-curved EC impeller in one ceiling module. A knife-edge gel seal isolates the downstream face from bypass leakage, while the internal pressure chamber distributes air evenly across the high-resistance filter. Individual 0-10 V control or network-ready regulation helps maintain the selected face velocity as filter resistance changes. It is intended for advanced microelectronics, nanotechnology and precision optical environments where an ordinary HEPA configuration may not provide the required particle-retention margin.
Основные характеристики
A gel-seal knife edge forms a continuous downstream barrier around the complete filter perimeter.
The EC impeller and pressure chamber maintain uniform discharge without a central high-velocity zone.
Room-side access can keep filter replacement and seal inspection within the controlled space.
Обеспокоенность клиентов продуктами
Ultrafine-particle control depends on both the ULPA media and the integrity of the complete fan, plenum and filter interface.
A high-efficiency filter can still allow bypass leakage around a compressed perimeter gasket.The knife-edge housing seats continuously in the gel channel to close the perimeter airflow path.
Dense ULPA media raises resistance and can reduce delivered face velocity as the filter loads.An EC fan with adjustable reserve pressure supports stable airflow through the higher-resistance filter pack.
Uneven plenum pressure creates local velocity peaks over sensitive wafers or optical components.Internal baffling spreads the fan discharge before it reaches the full ULPA filter face.
Removing a ceiling module from above can expose an ultraclean room during maintenance.A room-side replaceable arrangement allows the filter and sealing surface to be serviced from below.
Типичные приложения
Semiconductor wafer fabricationAdvanced display manufacturingPrecision optics assemblyNanotechnology research areasCritical mini-environments
Технические параметры
Representative construction ranges for a ceiling-mounted ULPA fan filter unit are listed below.
| Основной материал | Low-boron micro-glass or membrane ULPA mini-pleat pack with aluminium separators and EC centrifugal fan |
|---|---|
| Толщина панели | 330-450 mm overall module depth |
| эффективная ширина | 575-1170 mm nominal ceiling-grid width |
| Максимальная длина | Up to 1170 mm standard module length |
| Толщина линий стали | 0.8-1.2 mm powder-coated steel housing; stainless-steel option available |
| Плотность ядра | Approximately 90-120 kg/m³ compacted density of the ULPA filter pack |
| Теплопроводимость | Approximately 0.035-0.043 W/(m·K) for the high-efficiency micro-glass pack used in the ULPA FFU |
| Поверхностная отделка | White low-shedding powder coat with anodized aluminium or stainless perforated diffuser |
| Объединенный тип | Knife-edge gel-seal filter interface with closed-cell ceiling perimeter gasket |
| Customization | Доступно в зависимости от предполагаемого применения и операционной среды. |
Доступные варианты
U15, U16 or U17 filter classDry gasket or gel-seal interface0-10 V, Modbus or grouped EC controlTop-side or room-side filter access
Planning a ULPA Fan Filter Unit specification?
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