Three-quarter view of a white ULPA fan filter unit with blue EC control enclosure

FFU およびターミナル空気浄化装置

ULPA ファンフィルターユニット

A tightly sealed EC fan filter module configured with U15, U16 or U17 mini-pleat media for processes sensitive to ultrafine airborne particles.

U15-U17 Filter Options
Low-Leakage Gel Seal
Stable EC Airflow
Room-Side Service Option

見積もりリクエスト製品案内

商品紹介

This ULPA fan filter unit combines an aluminium mini-pleat ULPA panel, a rigid powder-coated plenum and a backward-curved EC impeller in one ceiling module. A knife-edge gel seal isolates the downstream face from bypass leakage, while the internal pressure chamber distributes air evenly across the high-resistance filter. Individual 0-10 V control or network-ready regulation helps maintain the selected face velocity as filter resistance changes. It is intended for advanced microelectronics, nanotechnology and precision optical environments where an ordinary HEPA configuration may not provide the required particle-retention margin.

主要な特徴

U15-U17 mini-pleat media provides a higher particulate-retention level than a standard H14 module.

A gel-seal knife edge forms a continuous downstream barrier around the complete filter perimeter.

The EC impeller and pressure chamber maintain uniform discharge without a central high-velocity zone.

Room-side access can keep filter replacement and seal inspection within the controlled space.

お客様の製品に関する懸念事項

Ultrafine-particle control depends on both the ULPA media and the integrity of the complete fan, plenum and filter interface.

A high-efficiency filter can still allow bypass leakage around a compressed perimeter gasket.The knife-edge housing seats continuously in the gel channel to close the perimeter airflow path.

Dense ULPA media raises resistance and can reduce delivered face velocity as the filter loads.An EC fan with adjustable reserve pressure supports stable airflow through the higher-resistance filter pack.

Uneven plenum pressure creates local velocity peaks over sensitive wafers or optical components.Internal baffling spreads the fan discharge before it reaches the full ULPA filter face.

Removing a ceiling module from above can expose an ultraclean room during maintenance.A room-side replaceable arrangement allows the filter and sealing surface to be serviced from below.

典型的な用途

Semiconductor wafer fabricationAdvanced display manufacturingPrecision optics assemblyNanotechnology research areasCritical mini-environments

技術的なパラメータ

Representative construction ranges for a ceiling-mounted ULPA fan filter unit are listed below.

コア材料	Low-boron micro-glass or membrane ULPA mini-pleat pack with aluminium separators and EC centrifugal fan
パネルの厚さ	330-450 mm overall module depth
有効幅	575 — 1170 mm 公称天井グリッド幅
最大長さ	最大 1170 mm 標準モジュール長
鋼鉄の厚さを直面する	0.8-1.2 mm powder-coated steel housing; stainless-steel option available
コア密度	Approximately 90-120 kg/m³ compacted density of the ULPA filter pack
熱伝導率	Approximately 0.035-0.043 W/(m·K) for the high-efficiency micro-glass pack used in the ULPA FFU
表面仕上げ	White low-shedding powder coat with anodized aluminium or stainless perforated diffuser
ジョイントタイプ	Knife-edge gel-seal filter interface with closed-cell ceiling perimeter gasket
カスタマイズ	意図したアプリケーションと動作環境に基づいて利用できます。

利用可能なオプション

U15, U16 or U17 filter classDry gasket or gel-seal interface0-10 V, Modbus or grouped EC controlTop-side or room-side filter access

Planning a ULPA Fan Filter Unit specification?

寸法、設置条件、性能目標、必要な表面仕上げをお送りください。

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