Industry-Specific Cleanroom Equipment

FOUP Storage Cabinet

A dedicated semiconductor stocker that supports 300 mm FOUPs at indexed positions with optional nitrogen purge and position-status monitoring.

Dedicated 300 mm FOUP Positions
Kinematic Pod Support
Optional Nitrogen Purge
Position Status Indication

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Product Introduction

The FOUP storage cabinet provides an organized buffer between semiconductor process tools and material-handling operations. Each storage position includes stable pod supports, controlled clearance and optional nitrogen purge coupling so a 300 mm FOUP can remain protected while waiting for its next step. Open-front access supports manual or automated transfer configurations, while local status indicators help operators identify occupied and available positions.

Key Features

Position-specific supports hold FOUPs at repeatable transfer height and orientation.

Optional nitrogen interfaces reduce oxygen and moisture exposure inside compatible stored pods.

Local occupancy indicators make available positions visible from the aisle.

Modular bay construction scales from compact manual buffers to larger stocker arrangements.

Customer Product Concerns

FOUP buffers must keep pods organized, correctly located and ready for safe transfer without consuming unnecessary cleanroom floor space.

FOUPs placed on general shelving can be misaligned or damaged during retrieval.Dedicated locating supports constrain each pod at a repeatable storage and pickup position.

Long queue times increase the risk of moisture and oxygen entering stored carriers.Optional position-level nitrogen couplings purge compatible FOUPs during storage.

Operators lose time searching for an empty or released location.Occupancy and status indicators identify available positions directly at the cabinet.

A fixed buffer cannot adapt when tool throughput changes.Modular vertical and horizontal bays allow storage capacity to follow the process layout.

Typical Applications

300 mm wafer fab bufferingProcess-tool interface storageMetrology queue managementSemiconductor material-handling areas

Technical Parameters

Typical construction values for a modular FOUP storage cabinet are shown below.

Core Material	Anodized aluminum frame with 304 stainless steel supports and engineering-polymer FOUP locating pads
Panel Thickness	1.5-3.0 mm service and divider panels
Effective Width	600-2400 mm cabinet width depending on bay count
Maximum Length	Up to 3000 mm modular stocker length
Steel Facing Thickness	1.2-2.0 mm stainless steel support and service panels
Core Density	2700 kg/m³ for aluminum framing and 7850-8000 kg/m³ for stainless supports
Thermal Conductivity	14-17 W/(m·K) for stainless support components
Surface Finish	Natural anodized aluminum with brushed stainless steel and black polymer locating surfaces
Joint Type	Bolted modular frame with indexed FOUP shelves, kinematic stops and optional purge couplings
Customization	Available based on the intended application and operating environment.

Available Options

Nitrogen purge at each positionManual or automated transfer interfaceOccupancy sensingCustom bay and tier count

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