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معدات الغرف النظيفة المحددة للصناعة
FOUP خزانة التخزين نظام التنظيف
A dedicated semiconductor stocker that supports 300 mm FOUPs at indexed positions with optional nitrogen purge and position-status monitoring.
- Dedicated 300 mm FOUP Positions
- Kinematic Pod Support
- Optional Nitrogen Purge
- Position Status Indication
مقدمة المنتج
The FOUP storage cabinet provides an organized buffer between semiconductor process tools and material-handling operations. Each storage position includes stable pod supports, controlled clearance and optional nitrogen purge coupling so a 300 mm FOUP can remain protected while waiting for its next step. Open-front access supports manual or automated transfer configurations, while local status indicators help operators identify occupied and available positions.
الخصائص الرئيسية
Optional nitrogen interfaces reduce oxygen and moisture exposure inside compatible stored pods.
Local occupancy indicators make available positions visible from the aisle.
Modular bay construction scales from compact manual buffers to larger stocker arrangements.
مخاوف المنتج للعملاء
FOUP buffers must keep pods organized, correctly located and ready for safe transfer without consuming unnecessary cleanroom floor space.
FOUPs placed on general shelving can be misaligned or damaged during retrieval.Dedicated locating supports constrain each pod at a repeatable storage and pickup position.
Long queue times increase the risk of moisture and oxygen entering stored carriers.Optional position-level nitrogen couplings purge compatible FOUPs during storage.
Operators lose time searching for an empty or released location.Occupancy and status indicators identify available positions directly at the cabinet.
A fixed buffer cannot adapt when tool throughput changes.Modular vertical and horizontal bays allow storage capacity to follow the process layout.
تطبيقات نموذجية
300 mm wafer fab bufferingProcess-tool interface storageMetrology queue managementSemiconductor material-handling areas
المعلمات الفنية
Typical construction values for a modular FOUP storage cabinet are shown below.
| المواد الأساسية | Anodized aluminum frame with 304 stainless steel supports and engineering-polymer FOUP locating pads |
|---|---|
| سمك اللوحة | 1.5-3.0 mm service and divider panels |
| العرض الفعال | 600-2400 mm cabinet width depending on bay count |
| الحد الأقصى الطول | Up to 3000 mm modular stocker length |
| الصلب يواجه سمك | 1.2-2.0 mm stainless steel support and service panels |
| الكثافة الأساسية | 2700 kg/m³ for aluminum framing and 7850-8000 kg/m³ for stainless supports |
| الموصلية الحرارية | 14-17 W/(m·K) for stainless support components |
| إنهاء السطح | Natural anodized aluminum with brushed stainless steel and black polymer locating surfaces |
| نوع المشترك | Bolted modular frame with indexed FOUP shelves, kinematic stops and optional purge couplings |
| التخصيص | متوفر على أساس التطبيق المقصود وبيئة التشغيل. |
الخيارات المتاحة
Nitrogen purge at each positionManual or automated transfer interfaceOccupancy sensingCustom bay and tier count
Planning a FOUP Storage Cabinet specification?
أرسل لنا الأبعاد الخاصة بك، شروط التثبيت، أهداف الأداء والتشطيب السطحي المطلوب.
