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Equipos de sala limpia específicos de la industria
Gabinete de almacenamiento FOUP
A dedicated semiconductor stocker that supports 300 mm FOUPs at indexed positions with optional nitrogen purge and position-status monitoring.
- Dedicated 300 mm FOUP Positions
- Kinematic Pod Support
- Optional Nitrogen Purge
- Position Status Indication
Introducción del producto
The FOUP storage cabinet provides an organized buffer between semiconductor process tools and material-handling operations. Each storage position includes stable pod supports, controlled clearance and optional nitrogen purge coupling so a 300 mm FOUP can remain protected while waiting for its next step. Open-front access supports manual or automated transfer configurations, while local status indicators help operators identify occupied and available positions.
Características clave
Optional nitrogen interfaces reduce oxygen and moisture exposure inside compatible stored pods.
Local occupancy indicators make available positions visible from the aisle.
Modular bay construction scales from compact manual buffers to larger stocker arrangements.
Preocupaciones del producto del cliente
FOUP buffers must keep pods organized, correctly located and ready for safe transfer without consuming unnecessary cleanroom floor space.
FOUPs placed on general shelving can be misaligned or damaged during retrieval.Dedicated locating supports constrain each pod at a repeatable storage and pickup position.
Long queue times increase the risk of moisture and oxygen entering stored carriers.Optional position-level nitrogen couplings purge compatible FOUPs during storage.
Operators lose time searching for an empty or released location.Occupancy and status indicators identify available positions directly at the cabinet.
A fixed buffer cannot adapt when tool throughput changes.Modular vertical and horizontal bays allow storage capacity to follow the process layout.
Aplicaciones típicas
300 mm wafer fab bufferingProcess-tool interface storageMetrology queue managementSemiconductor material-handling areas
Parámetros técnicos
Typical construction values for a modular FOUP storage cabinet are shown below.
| Materiales Core | Anodized aluminum frame with 304 stainless steel supports and engineering-polymer FOUP locating pads |
|---|---|
| Panel de espesor | 1.5-3.0 mm service and divider panels |
| Ancho efectivo | 600-2400 mm cabinet width depending on bay count |
| Longitud máxima | Up to 3000 mm modular stocker length |
| Acero frente a espesor | 1.2-2.0 mm stainless steel support and service panels |
| Densidad Core | 2700 kg/m³ for aluminum framing and 7850-8000 kg/m³ for stainless supports |
| Conductividad térmica | 14-17 W/(m·K) for stainless support components |
| Superficie acabada | Natural anodized aluminum with brushed stainless steel and black polymer locating surfaces |
| Tipo conjunto | Bolted modular frame with indexed FOUP shelves, kinematic stops and optional purge couplings |
| Customization | Disponible según la aplicación prevista y el entorno operativo. |
Opciones disponibles
Nitrogen purge at each positionManual or automated transfer interfaceOccupancy sensingCustom bay and tier count
Planning a FOUP Storage Cabinet specification?
Envíenos sus dimensiones, condiciones de instalación, objetivos de rendimiento y acabado superficial requerido.
