FOUP storage cabinet in complete three-quarter view with dedicated pod positions

산업별 클린룸 장비

FOUP 스토리지 캐비닛

A dedicated semiconductor stocker that supports 300 mm FOUPs at indexed positions with optional nitrogen purge and position-status monitoring.

Dedicated 300 mm FOUP Positions
Kinematic Pod Support
Optional Nitrogen Purge
Position Status Indication

견적 요청 제품 찾아보기

상품 소개

The FOUP storage cabinet provides an organized buffer between semiconductor process tools and material-handling operations. Each storage position includes stable pod supports, controlled clearance and optional nitrogen purge coupling so a 300 mm FOUP can remain protected while waiting for its next step. Open-front access supports manual or automated transfer configurations, while local status indicators help operators identify occupied and available positions.

주요 기능

Position-specific supports hold FOUPs at repeatable transfer height and orientation.

Optional nitrogen interfaces reduce oxygen and moisture exposure inside compatible stored pods.

Local occupancy indicators make available positions visible from the aisle.

Modular bay construction scales from compact manual buffers to larger stocker arrangements.

고객 제품 관심사

FOUP buffers must keep pods organized, correctly located and ready for safe transfer without consuming unnecessary cleanroom floor space.

FOUPs placed on general shelving can be misaligned or damaged during retrieval.Dedicated locating supports constrain each pod at a repeatable storage and pickup position.

Long queue times increase the risk of moisture and oxygen entering stored carriers.Optional position-level nitrogen couplings purge compatible FOUPs during storage.

Operators lose time searching for an empty or released location.Occupancy and status indicators identify available positions directly at the cabinet.

A fixed buffer cannot adapt when tool throughput changes.Modular vertical and horizontal bays allow storage capacity to follow the process layout.

일반적인 응용 프로그램

300 mm wafer fab bufferingProcess-tool interface storageMetrology queue managementSemiconductor material-handling areas

기술 매개변수

Typical construction values for a modular FOUP storage cabinet are shown below.

핵심 재료	Anodized aluminum frame with 304 stainless steel supports and engineering-polymer FOUP locating pads
패널 두께	1.5-3.0 mm service and divider panels
유효 폭	600-2400 mm cabinet width depending on bay count
최대 길이	Up to 3000 mm modular stocker length
강철 면면 두께	1.2-2.0 mm stainless steel support and service panels
코어 밀도	2700 kg/m³ for aluminum framing and 7850-8000 kg/m³ for stainless supports
열전도도 (Thermal Conductivity)	14-17 W/(m·K) for stainless support components
표면 마무리	Natural anodized aluminum with brushed stainless steel and black polymer locating surfaces
접합 유형	Bolted modular frame with indexed FOUP shelves, kinematic stops and optional purge couplings
사용자 정의	의도된 응용 프로그램 및 운영 환경에 따라 사용할 수 있습니다.

사용 가능한 옵션

Nitrogen purge at each positionManual or automated transfer interfaceOccupancy sensingCustom bay and tier count

Planning a FOUP Storage Cabinet specification?

치수, 설치 조건, 성능 목표 및 필요한 표면 마감을 보내십시오.

우리 팀과 대화하십시오.