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FFU and Terminal Air Purification Equipment

Cleanroom Recirculation Air Unit (RCU)

A self-contained return-air module that recirculates, filters and optionally cools local cleanroom air through a controlled EC fan and terminal HEPA or ULPA stage.
  • Return-Air Recirculation
  • Optional Cooling Coil
  • EC Volume Control
  • Integrated Prefilter and HEPA
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Product Introduction

The cleanroom recirculation air unit draws room return air through a washable prefilter, passes it across an optional chilled-water coil and drives it through a HEPA or ULPA final filter. Fan, coil, condensate tray and controls are contained in a serviceable vertical cabinet, reducing the duct length required for a local clean zone. Temperature sensors can modulate the coil valve independently of EC fan speed so thermal load and cleanliness airflow are addressed separately. Supply may discharge through a front diffuser or connect to a short ceiling plenum serving adjacent work areas.

Key Features

A return grille and prefilter capture coarse loading before it reaches the cooling coil and final filter.

The optional chilled-water coil removes local sensible heat without sending all recirculated air back to a remote AHU.

Separate EC fan and valve control allows airflow volume and temperature response to be tuned independently.

A sloped stainless condensate tray provides a defined drainage path beneath the cooling section.

Customer Product Concerns

High recirculation rates and concentrated equipment heat can overload distant ductwork even when the central make-up air system is correctly sized.

Long return-air paths consume fan energy and leave temperature gradients between process bays.The local RCU recycles room air close to the load and shortens the high-volume airflow path.
Process heat rises while the required clean-air volume remains constant.Independent chilled-water valve modulation adjusts cooling without unnecessarily changing the filtration airflow.
Condensation below a cooling coil creates a hygiene and leakage risk inside the cleanroom envelope.A sloped stainless tray and trapped drain connection collect condensate within the service compartment.
Dust on the coil increases resistance and makes wet-surface cleaning difficult.An accessible upstream prefilter intercepts coarse particles before the coil face.

Typical Applications

Semiconductor bay recirculationBattery dry-room process zonesPharmaceutical support roomsPrecision metrology laboratoriesLocal high-heat clean equipment areas

Technical Parameters

Typical enclosure and filtration ranges for a local cleanroom recirculation unit are listed below.

Core MaterialEC centrifugal fan, optional copper-aluminium cooling coil, washable prefilter and micro-glass HEPA or ULPA pack
Panel Thickness550-900 mm cabinet depth
Effective Width700-1400 mm serviceable cabinet width
Maximum LengthUp to 2400 mm overall vertical cabinet height
Steel Facing Thickness1.0-1.5 mm powder-coated steel casing with 1.0-1.5 mm stainless wet-section liner
Core DensityApproximately 40-60 kg/m³ density for the closed-cell cabinet insulation
Thermal ConductivityApproximately 0.022-0.030 W/(m·K) for the closed-cell thermal insulation
Surface FinishWhite low-shedding powder coat with stainless-steel coil and condensate compartment
Joint TypeGasketed double-skin service doors with flanged supply outlet and trapped condensate-drain connection
CustomizationAvailable based on the intended application and operating environment.

Available Options

Cooling-only or fan-and-filter configurationFront discharge or plenum connectionHEPA H14 or ULPA final filterTemperature, pressure and network control package

Planning a Cleanroom Recirculation Air Unit (RCU) specification?

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