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FFU およびターミナル空気浄化装置
クリーンルーム再循環空気ユニット （ RCU ）
A self-contained return-air module that recirculates, filters and optionally cools local cleanroom air through a controlled EC fan and terminal HEPA or ULPA stage.
- Return-Air Recirculation
- Optional Cooling Coil
- EC Volume Control
- Integrated Prefilter and HEPA
商品紹介
The cleanroom recirculation air unit draws room return air through a washable prefilter, passes it across an optional chilled-water coil and drives it through a HEPA or ULPA final filter. Fan, coil, condensate tray and controls are contained in a serviceable vertical cabinet, reducing the duct length required for a local clean zone. Temperature sensors can modulate the coil valve independently of EC fan speed so thermal load and cleanliness airflow are addressed separately. Supply may discharge through a front diffuser or connect to a short ceiling plenum serving adjacent work areas.
主要な特徴
The optional chilled-water coil removes local sensible heat without sending all recirculated air back to a remote AHU.
Separate EC fan and valve control allows airflow volume and temperature response to be tuned independently.
A sloped stainless condensate tray provides a defined drainage path beneath the cooling section.
お客様の製品に関する懸念事項
High recirculation rates and concentrated equipment heat can overload distant ductwork even when the central make-up air system is correctly sized.
Long return-air paths consume fan energy and leave temperature gradients between process bays.The local RCU recycles room air close to the load and shortens the high-volume airflow path.
Process heat rises while the required clean-air volume remains constant.Independent chilled-water valve modulation adjusts cooling without unnecessarily changing the filtration airflow.
Condensation below a cooling coil creates a hygiene and leakage risk inside the cleanroom envelope.A sloped stainless tray and trapped drain connection collect condensate within the service compartment.
Dust on the coil increases resistance and makes wet-surface cleaning difficult.An accessible upstream prefilter intercepts coarse particles before the coil face.
典型的な用途
Semiconductor bay recirculationBattery dry-room process zonesPharmaceutical support roomsPrecision metrology laboratoriesLocal high-heat clean equipment areas
技術的なパラメータ
Typical enclosure and filtration ranges for a local cleanroom recirculation unit are listed below.
| コア材料 | EC centrifugal fan, optional copper-aluminium cooling coil, washable prefilter and micro-glass HEPA or ULPA pack |
|---|---|
| パネルの厚さ | 550-900 mm cabinet depth |
| 有効幅 | 700-1400 mm serviceable cabinet width |
| 最大長さ | Up to 2400 mm overall vertical cabinet height |
| 鋼鉄の厚さを直面する | 1.0-1.5 mm powder-coated steel casing with 1.0-1.5 mm stainless wet-section liner |
| コア密度 | Approximately 40-60 kg/m³ density for the closed-cell cabinet insulation |
| 熱伝導率 | Approximately 0.022-0.030 W/(m·K) for the closed-cell thermal insulation |
| 表面仕上げ | White low-shedding powder coat with stainless-steel coil and condensate compartment |
| ジョイントタイプ | Gasketed double-skin service doors with flanged supply outlet and trapped condensate-drain connection |
| カスタマイズ | 意図したアプリケーションと動作環境に基づいて利用できます。 |
利用可能なオプション
Cooling-only or fan-and-filter configurationFront discharge or plenum connectionHEPA H14 or ULPA final filterTemperature, pressure and network control package
Planning a Cleanroom Recirculation Air Unit (RCU) specification?
寸法、設置条件、性能目標、必要な表面仕上げをお送りください。
