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معدات الغرف النظيفة المحددة للصناعة
Semiconductor البيئة الصغيرة
A compact process enclosure that creates a localized clean-air zone around sensitive semiconductor handling or inspection operations.
- Localized HEPA Airflow
- Transparent Process Access
- Low-Shedding Construction
- Configurable Tool Interface
مقدمة المنتج
The semiconductor mini-environment combines an anodized aluminum frame, clear enclosure panels, an overhead fan-filter module and a cleanable stainless work deck. It separates the protected process zone from surrounding room traffic while preserving direct visibility and controlled operator access. Service panels, utility penetrations and equipment interfaces can be arranged around the installed tool, wafer handler or inspection fixture.
الخصائص الرئيسية
Clear panels maintain process visibility while limiting uncontrolled room-air entry.
Smooth metal work surfaces and low-shedding frame components support routine cleaning.
Modular access, controls and utility penetrations adapt to the enclosed process equipment.
مخاوف المنتج للعملاء
Localized wafer operations need stable cleanliness without enclosing an entire production bay to the same stringent conditions.
Room traffic can carry particles toward an exposed wafer-handling step.A filtered vertical airflow zone and physical enclosure shield the critical process area.
Opaque guards make it difficult to observe equipment and material status.Clear access panels preserve visibility from multiple sides without opening the enclosure.
A fixed enclosure can conflict with tool service and utility connections.Modular framing allows service doors, removable panels and penetrations to follow the actual tool layout.
Broad shadows and inaccessible corners complicate cleaning inspection.Smooth work surfaces and an open, visible internal layout reduce hidden residue traps.
تطبيقات نموذجية
Wafer inspection and metrologySemiconductor assembly operationsSensitive substrate handlingTool loading and process isolation
المعلمات الفنية
Typical construction values for a modular semiconductor mini-environment are listed below.
| المواد الأساسية | Anodized aluminum frame with clear polycarbonate panels and stainless steel work surfaces |
|---|---|
| سمك اللوحة | 6-10 mm transparent enclosure panels |
| العرض الفعال | 1200-2400 mm process enclosure width |
| الحد الأقصى الطول | Up to 3000 mm modular enclosure length |
| الصلب يواجه سمك | 1.0-1.5 mm stainless steel work and cabinet panels |
| الكثافة الأساسية | 2700 kg/m³ for aluminum framing and 7850-8000 kg/m³ for stainless components |
| الموصلية الحرارية | 14-17 W/(m·K) for stainless work surfaces |
| إنهاء السطح | Natural anodized aluminum, clear glazing and brushed stainless steel |
| نوع المشترك | Bolted modular extrusion joints with gasketed removable access panels |
| التخصيص | متوفر على أساس التطبيق المقصود وبيئة التشغيل. |
الخيارات المتاحة
HEPA or ULPA terminal filtrationSliding or hinged access panelsIonization and task lightingTool-specific utility penetrations
Planning a Semiconductor Mini-Environment specification?
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