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Cleanroom Material Handling and Storage
FOUP Transport Cart
A two-level stainless FOUP transport cart with dark static-dissipative shelf mats, triangular locator pins, raised retaining ledges, conductive casters and grounding chain.
- Three-point locator sets position each 300 mm FOUP consistently on the shelf
- Static-dissipative mats and grounding options support charge-controlled handling
- Raised three-sided ledges keep carriers inside the cart footprint during movement
Product Introduction
The FOUP transport cart provides dedicated manual mobility for closed 300 mm wafer carriers between semiconductor process and storage points. Each solid stainless shelf holds a replaceable static-dissipative mat and a three-pin locator pattern aligned to the carrier base. Three raised shelf edges protect the load envelope, while the open front supports direct placement and retrieval. The welded frame, integrated handle and conductive rolling hardware are selected for controlled cleanroom movement.
Key Features
Three locator pins on each shelf establish repeatable carrier orientation.
Dark ESD mats cushion the base and provide a controlled contact surface.
Raised rear and side ledges resist carrier migration without obstructing front loading.
Conductive casters and a grounding chain provide configurable charge-dissipation paths.
Customer Product Concerns
Generic carts do not positively locate FOUP bases, allow carriers to shift during turns and may accumulate charge beneath sensitive wafer enclosures.
Carrier misalignment on the shelfA dedicated three-point locator pattern establishes repeatable orientation.
Sliding during accelerationStatic-dissipative mats and three raised ledges retain the carrier footprint.
Electrostatic charge buildupConductive casters, bonded frame and grounding-chain options create defined dissipation paths.
Cleaning around loose accessoriesMats are removable and the welded stainless frame exposes accessible wipe-down surfaces.
Typical Applications
Manual movement and temporary staging of 300 mm FOUPs or compatible front-opening wafer carriers at load ports, metrology stations, stocker interfaces and semiconductor cleanroom work cells.
Technical Parameters
Locator-pin coordinates must match the target FOUP bottom interface so the carrier rests on its intended support features rather than on the shell. Shelf stiffness, mat thickness and ledge clearance are chosen around loaded mass and operator access. The stainless frame transfers shelf loads to four corner casters; grounding continuity between shelves, frame and rolling hardware is verified for the supplied configuration.
| Core Material | 304 or 316L stainless steel frame with static-dissipative polymer shelf mats |
|---|---|
| Panel Thickness | 1.2–2.0 mm solid stainless shelf pans |
| Effective Width | 420–650 mm usable shelf width |
| Maximum Length | Up to 900 mm overall cart length |
| Steel Facing Thickness | 1.2–2.0 mm exposed stainless shelf surfaces |
| Core Density | 7900–8000 kg/m³ nominal stainless steel density |
| Thermal Conductivity | Approximately 14.6–16.2 W/(m·K) at room temperature |
| Surface Finish | Fine-brushed or electropolished stainless steel with removable textured ESD mats |
| Joint Type | Continuously welded square-tube frame with retained solid shelves, three-point locator sets and swivel casters |
| Customization | Available based on the intended application and operating environment. |
Available Options
304 or 316L stainless steel, one or two FOUP levels, carrier-specific locator pattern, replaceable ESD mat, conductive casters, grounding chain, spring-loaded wheels, parking brakes, RFID holder and protective front restraint.
Planning a FOUP Transport Cart specification?
Send us your dimensions, installation conditions, performance targets and required surface finish.
