Complete empty FOUP transport cart in front-left three-quarter view

クリーンルーム材料の取り扱い · 貯蔵

FOUP 輸送カート

A two-level stainless FOUP transport cart with dark static-dissipative shelf mats, triangular locator pins, raised retaining ledges, conductive casters and grounding chain.

Three-point locator sets position each 300 mm FOUP consistently on the shelf
Static-dissipative mats and grounding options support charge-controlled handling
Raised three-sided ledges keep carriers inside the cart footprint during movement

見積もりリクエスト製品案内

商品紹介

The FOUP transport cart provides dedicated manual mobility for closed 300 mm wafer carriers between semiconductor process and storage points. Each solid stainless shelf holds a replaceable static-dissipative mat and a three-pin locator pattern aligned to the carrier base. Three raised shelf edges protect the load envelope, while the open front supports direct placement and retrieval. The welded frame, integrated handle and conductive rolling hardware are selected for controlled cleanroom movement.

主要な特徴

Two dedicated carrier positions separate loads and limit stacking-related handling.

Three locator pins on each shelf establish repeatable carrier orientation.

Dark ESD mats cushion the base and provide a controlled contact surface.

Raised rear and side ledges resist carrier migration without obstructing front loading.

Conductive casters and a grounding chain provide configurable charge-dissipation paths.

お客様の製品に関する懸念事項

Generic carts do not positively locate FOUP bases, allow carriers to shift during turns and may accumulate charge beneath sensitive wafer enclosures.

Carrier misalignment on the shelfA dedicated three-point locator pattern establishes repeatable orientation.

Sliding during accelerationStatic-dissipative mats and three raised ledges retain the carrier footprint.

Electrostatic charge buildupConductive casters, bonded frame and grounding-chain options create defined dissipation paths.

Cleaning around loose accessoriesMats are removable and the welded stainless frame exposes accessible wipe-down surfaces.

典型的な用途

Manual movement and temporary staging of 300 mm FOUPs or compatible front-opening wafer carriers at load ports, metrology stations, stocker interfaces and semiconductor cleanroom work cells.

技術的なパラメータ

Locator-pin coordinates must match the target FOUP bottom interface so the carrier rests on its intended support features rather than on the shell. Shelf stiffness, mat thickness and ledge clearance are chosen around loaded mass and operator access. The stainless frame transfers shelf loads to four corner casters; grounding continuity between shelves, frame and rolling hardware is verified for the supplied configuration.

コア材料	304 or 316L stainless steel frame with static-dissipative polymer shelf mats
パネルの厚さ	1.2–2.0 mm solid stainless shelf pans
有効幅	420–650 mm usable shelf width
最大長さ	Up to 900 mm overall cart length
鋼鉄の厚さを直面する	1.2–2.0 mm exposed stainless shelf surfaces
コア密度	7900–8000 kg/m³ nominal stainless steel density
熱伝導率	室温で約 14.6 — 16.2 W / （m · K）
表面仕上げ	Fine-brushed or electropolished stainless steel with removable textured ESD mats
ジョイントタイプ	Continuously welded square-tube frame with retained solid shelves, three-point locator sets and swivel casters
カスタマイズ	意図したアプリケーションと動作環境に基づいて利用できます。

利用可能なオプション

304 or 316L stainless steel, one or two FOUP levels, carrier-specific locator pattern, replaceable ESD mat, conductive casters, grounding chain, spring-loaded wheels, parking brakes, RFID holder and protective front restraint.

Planning a FOUP Transport Cart specification?

寸法、設置条件、性能目標、必要な表面仕上げをお送りください。

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