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Cleanroom Control and Environmental Monitoring Systems
Differential Pressure Sensor
A compact low-range sensor that detects the pressure difference between a cleanroom and reference space for control, display or alarm input.
- Low-Range MEMS Measurement
- Dual Reference Ports
- Fast Room Response
- Zero Adjustment Access
Product Introduction
This differential pressure sensor uses a silicon MEMS element to measure the small pressure differences found across cleanroom doors, walls, filters and airflow devices. Separate high and low ports accept clean tubing from the monitored and reference sides. The compact module can mount inside a room controller or protected enclosure, keeping the sensitive element away from direct handling. Temperature compensation and accessible zero adjustment support stable readings near zero where room-pressure decisions are made.
Key Features
Barbed high and low ports keep the reference direction physically clear.
Temperature-compensated MEMS sensing reduces drift across normal indoor conditions.
Compact board or enclosure formats integrate into displays, controllers and transmitters.
Customer Product Concerns
Near-zero differential pressure is easily distorted by tubing errors, sensor drift and excessive measurement range.
A high-range sensor shows little change across the cleanroom operating band.A low-range MEMS element provides finer resolution around the required pressure setpoint.
Reversed tubing makes positive rooms appear negative.Clearly marked high and low ports preserve the intended reference direction.
Small zero drift creates false alarms when the room is stable.Accessible zero adjustment and temperature compensation reduce offset near zero.
Direct exposure to cleaning activity damages the sensing element.Remote pressure tubing allows the sensor module to remain in a protected enclosure.
Typical Applications
Room-to-corridor pressure sensingAirlock differential measurementHEPA filter pressure monitoringLow-pressure airflow devices
Technical Parameters
Typical materials and dimensions for a cleanroom low-range differential pressure sensor are listed below.
| Core Material | Silicon MEMS sensing die with glass-filled polymer body and nickel-plated brass pressure ports |
|---|---|
| Panel Thickness | 18-35 mm sensor body depth |
| Effective Width | 35-80 mm housing width |
| Maximum Length | Up to 120 mm housing length |
| Steel Facing Thickness | 0 mm; non-metallic sensor housing |
| Core Density | 1350-1550 kg/m³ for glass-filled polymer housing |
| Thermal Conductivity | 0.25-0.40 W/(m·K) for reinforced polymer housing |
| Surface Finish | Smooth white or light-gray polymer housing with blue high-low port markings |
| Joint Type | Dual barbed pressure ports with board connector or pluggable electrical terminal |
| Customization | Available based on the intended application and operating environment. |
Available Options
Positive, negative or bidirectional rangeBoard-mount or enclosed formatAnalog or digital outputAutomatic zero function
Planning a Differential Pressure Sensor specification?
Send us your dimensions, installation conditions, performance targets and required surface finish.
