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클린룸 제어 및 환경 모니터링 시스템 (Cleanroom Control and Environment Monitoring Systems)

차압 센서 Differential Pressure Sensor

A compact low-range sensor that detects the pressure difference between a cleanroom and reference space for control, display or alarm input.
  • Low-Range MEMS Measurement
  • Dual Reference Ports
  • Fast Room Response
  • Zero Adjustment Access
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상품 소개

This differential pressure sensor uses a silicon MEMS element to measure the small pressure differences found across cleanroom doors, walls, filters and airflow devices. Separate high and low ports accept clean tubing from the monitored and reference sides. The compact module can mount inside a room controller or protected enclosure, keeping the sensitive element away from direct handling. Temperature compensation and accessible zero adjustment support stable readings near zero where room-pressure decisions are made.

주요 기능

Low full-scale ranges provide useful resolution for cleanroom pressure cascades.

Barbed high and low ports keep the reference direction physically clear.

Temperature-compensated MEMS sensing reduces drift across normal indoor conditions.

Compact board or enclosure formats integrate into displays, controllers and transmitters.

고객 제품 관심사

Near-zero differential pressure is easily distorted by tubing errors, sensor drift and excessive measurement range.

A high-range sensor shows little change across the cleanroom operating band.A low-range MEMS element provides finer resolution around the required pressure setpoint.
Reversed tubing makes positive rooms appear negative.Clearly marked high and low ports preserve the intended reference direction.
Small zero drift creates false alarms when the room is stable.Accessible zero adjustment and temperature compensation reduce offset near zero.
Direct exposure to cleaning activity damages the sensing element.Remote pressure tubing allows the sensor module to remain in a protected enclosure.

일반적인 응용 프로그램

Room-to-corridor pressure sensingAirlock differential measurementHEPA filter pressure monitoringLow-pressure airflow devices

기술 매개변수

Typical materials and dimensions for a cleanroom low-range differential pressure sensor are listed below.

핵심 재료Silicon MEMS sensing die with glass-filled polymer body and nickel-plated brass pressure ports
패널 두께18-35 mm sensor body depth
유효 폭35-80 mm housing width
최대 길이Up to 120 mm housing length
강철 면면 두께0 mm; non-metallic sensor housing
코어 밀도1350-1550 kg/m³ for glass-filled polymer housing
열전도도 (Thermal Conductivity)0.25-0.40 W/(m·K) for reinforced polymer housing
표면 마무리Smooth white or light-gray polymer housing with blue high-low port markings
접합 유형Dual barbed pressure ports with board connector or pluggable electrical terminal
사용자 정의의도된 응용 프로그램 및 운영 환경에 따라 사용할 수 있습니다.

사용 가능한 옵션

Positive, negative or bidirectional rangeBoard-mount or enclosed formatAnalog or digital outputAutomatic zero function

Planning a Differential Pressure Sensor specification?

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