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Equipamento de sala limpa específico da indústria
Cartão de transferência de wafer
A cleanable stainless steel cart that supports wafer boxes on retained, airflow-friendly shelves during low-vibration movement through controlled areas.
- Secure Wafer-Box Retention
- Low-Shedding Stainless Frame
- Airflow-Friendly Shelves
- Smooth Locking Casters
Introdução do produto
The wafer transfer cart uses rounded stainless tubing, perforated or angled shelves and position-retaining rails to protect wafer boxes during manual movement. Smooth exposed surfaces reduce particle traps and simplify wiping, while large polyurethane casters absorb small floor irregularities that could disturb fragile wafer loads. Shelf spacing and retaining geometry can be matched to common 150 mm, 200 mm or 300 mm lot-box formats.
Características-chave
Perforated shelves preserve vertical cleanroom airflow and reduce horizontal particle-collection surfaces.
Rounded stainless frame members minimize corners and exposed crevices during cleaning.
Large locking polyurethane casters provide smooth rolling and secure parking at transfer stations.
Preocupações do produto do cliente
Manual wafer transport must limit vibration, prevent box movement and remain easy to clean without obstructing cleanroom airflow.
Wafer boxes can slide on a flat trolley during turning or braking.Angled shelves, dividers and retaining rails constrain each carrier position.
Small hard casters transmit floor joints directly to fragile wafer loads.Larger polyurethane wheels improve rolling smoothness and reduce shock transmission.
Box-section frames and solid shelves create difficult-to-clean particle traps.Rounded tubing and perforated shelf surfaces reduce ledges and hidden corners.
An unlocked cart can move while operators transfer a wafer box.Positive caster brakes secure the cart at loading and process-interface points.
Aplicações típicas
Wafer lot transport between process areasMetrology and inspection stagingSemiconductor cleanroom material movementControlled transfer of closed wafer boxes
Parâmetros técnicos
Typical construction values for a stainless cleanroom wafer transfer cart are shown below.
| Material principal | 304 or 316L stainless steel tubular frame with stainless perforated shelves |
|---|---|
| Painel de espessura | 1.0-1.5 mm shelf sheet thickness |
| Largura efetiva | 750-1450 mm cart width |
| Comprimento máximo | Up to 1600 mm cart length |
| Aço enfrentando espessura | 1.0-1.5 mm stainless steel shelves and retaining panels |
| Densidade Core | 7850-8000 kg/m³ for stainless steel components |
| Condutividade térmica | 14-17 W/(m·K) for stainless steel structure |
| Superfície acabado | Brushed or electropolished stainless steel with smooth deburred edges |
| Tipo conjunto | Continuous welded tubular frame with removable shelf dividers and locking caster plates |
| Customização | Disponível com base na aplicação pretendida e no ambiente operacional. |
Opções disponíveis
150 mm, 200 mm or 300 mm box layoutAngled or level perforated shelves304 or 316L stainless steelCustom shelf and retaining-rail arrangement
Planning a Wafer Transfer Cart specification?
Envie-nos as suas dimensões, condições de instalação, metas de desempenho e acabamento de superfície necessário.
