Wafer transfer cart in complete three-quarter view with retained wafer box

業界特有のクリーンルーム機器

ウエハ転送カート

A cleanable stainless steel cart that supports wafer boxes on retained, airflow-friendly shelves during low-vibration movement through controlled areas.

Secure Wafer-Box Retention
Low-Shedding Stainless Frame
Airflow-Friendly Shelves
Smooth Locking Casters

見積もりリクエスト製品案内

商品紹介

The wafer transfer cart uses rounded stainless tubing, perforated or angled shelves and position-retaining rails to protect wafer boxes during manual movement. Smooth exposed surfaces reduce particle traps and simplify wiping, while large polyurethane casters absorb small floor irregularities that could disturb fragile wafer loads. Shelf spacing and retaining geometry can be matched to common 150 mm, 200 mm or 300 mm lot-box formats.

主要な特徴

Retaining rails and adjustable dividers keep wafer boxes from shifting during travel.

Perforated shelves preserve vertical cleanroom airflow and reduce horizontal particle-collection surfaces.

Rounded stainless frame members minimize corners and exposed crevices during cleaning.

Large locking polyurethane casters provide smooth rolling and secure parking at transfer stations.

お客様の製品に関する懸念事項

Manual wafer transport must limit vibration, prevent box movement and remain easy to clean without obstructing cleanroom airflow.

Wafer boxes can slide on a flat trolley during turning or braking.Angled shelves, dividers and retaining rails constrain each carrier position.

Small hard casters transmit floor joints directly to fragile wafer loads.Larger polyurethane wheels improve rolling smoothness and reduce shock transmission.

Box-section frames and solid shelves create difficult-to-clean particle traps.Rounded tubing and perforated shelf surfaces reduce ledges and hidden corners.

An unlocked cart can move while operators transfer a wafer box.Positive caster brakes secure the cart at loading and process-interface points.

典型的な用途

Wafer lot transport between process areasMetrology and inspection stagingSemiconductor cleanroom material movementControlled transfer of closed wafer boxes

技術的なパラメータ

Typical construction values for a stainless cleanroom wafer transfer cart are shown below.

コア材料	304 or 316L stainless steel tubular frame with stainless perforated shelves
パネルの厚さ	1.0-1.5 mm shelf sheet thickness
有効幅	750-1450 mm cart width
最大長さ	Up to 1600 mm cart length
鋼鉄の厚さを直面する	1.0-1.5 mm stainless steel shelves and retaining panels
コア密度	7850-8000 kg/m³ for stainless steel components
熱伝導率	14-17 W/(m·K) for stainless steel structure
表面仕上げ	Brushed or electropolished stainless steel with smooth deburred edges
ジョイントタイプ	Continuous welded tubular frame with removable shelf dividers and locking caster plates
カスタマイズ	意図したアプリケーションと動作環境に基づいて利用できます。

利用可能なオプション

150 mm, 200 mm or 300 mm box layoutAngled or level perforated shelves304 or 316L stainless steelCustom shelf and retaining-rail arrangement

Planning a Wafer Transfer Cart specification?

寸法、設置条件、性能目標、必要な表面仕上げをお送りください。

チームに相談する