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Equipement de salle blanche spécifique à l'industrie

Cart de transfert Wafer

A cleanable stainless steel cart that supports wafer boxes on retained, airflow-friendly shelves during low-vibration movement through controlled areas.
  • Secure Wafer-Box Retention
  • Low-Shedding Stainless Frame
  • Airflow-Friendly Shelves
  • Smooth Locking Casters
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Introduction de produit

The wafer transfer cart uses rounded stainless tubing, perforated or angled shelves and position-retaining rails to protect wafer boxes during manual movement. Smooth exposed surfaces reduce particle traps and simplify wiping, while large polyurethane casters absorb small floor irregularities that could disturb fragile wafer loads. Shelf spacing and retaining geometry can be matched to common 150 mm, 200 mm or 300 mm lot-box formats.

Key Features

Retaining rails and adjustable dividers keep wafer boxes from shifting during travel.

Perforated shelves preserve vertical cleanroom airflow and reduce horizontal particle-collection surfaces.

Rounded stainless frame members minimize corners and exposed crevices during cleaning.

Large locking polyurethane casters provide smooth rolling and secure parking at transfer stations.

Préoccupations du client produit

Manual wafer transport must limit vibration, prevent box movement and remain easy to clean without obstructing cleanroom airflow.

Wafer boxes can slide on a flat trolley during turning or braking.Angled shelves, dividers and retaining rails constrain each carrier position.
Small hard casters transmit floor joints directly to fragile wafer loads.Larger polyurethane wheels improve rolling smoothness and reduce shock transmission.
Box-section frames and solid shelves create difficult-to-clean particle traps.Rounded tubing and perforated shelf surfaces reduce ledges and hidden corners.
An unlocked cart can move while operators transfer a wafer box.Positive caster brakes secure the cart at loading and process-interface points.

Les applications typiques

Wafer lot transport between process areasMetrology and inspection stagingSemiconductor cleanroom material movementControlled transfer of closed wafer boxes

Paramètres techniques

Typical construction values for a stainless cleanroom wafer transfer cart are shown below.

Matériaux de base304 or 316L stainless steel tubular frame with stainless perforated shelves
Panneau épaisseur1.0-1.5 mm shelf sheet thickness
Largeur effective750-1450 mm cart width
Longueur maximaleUp to 1600 mm cart length
Acier face épaisseur1.0-1.5 mm stainless steel shelves and retaining panels
Densité Core7850-8000 kg/m³ for stainless steel components
Conductivité thermique14-17 W/(m·K) for stainless steel structure
surface finieBrushed or electropolished stainless steel with smooth deburred edges
Type jointContinuous welded tubular frame with removable shelf dividers and locking caster plates
CustomisationDisponible en fonction de l'application prévue et de l'environnement d'exploitation.

Options disponibles

150 mm, 200 mm or 300 mm box layoutAngled or level perforated shelves304 or 316L stainless steelCustom shelf and retaining-rail arrangement

Planning a Wafer Transfer Cart specification?

Envoyez-nous vos dimensions, conditions d'installation, objectifs de performance et finition de surface requise.

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