Wafer transfer cart in complete three-quarter view with retained wafer box

산업별 클린룸 장비

웨이퍼 이송 카트

A cleanable stainless steel cart that supports wafer boxes on retained, airflow-friendly shelves during low-vibration movement through controlled areas.

Secure Wafer-Box Retention
Low-Shedding Stainless Frame
Airflow-Friendly Shelves
Smooth Locking Casters

견적 요청 제품 찾아보기

상품 소개

The wafer transfer cart uses rounded stainless tubing, perforated or angled shelves and position-retaining rails to protect wafer boxes during manual movement. Smooth exposed surfaces reduce particle traps and simplify wiping, while large polyurethane casters absorb small floor irregularities that could disturb fragile wafer loads. Shelf spacing and retaining geometry can be matched to common 150 mm, 200 mm or 300 mm lot-box formats.

주요 기능

Retaining rails and adjustable dividers keep wafer boxes from shifting during travel.

Perforated shelves preserve vertical cleanroom airflow and reduce horizontal particle-collection surfaces.

Rounded stainless frame members minimize corners and exposed crevices during cleaning.

Large locking polyurethane casters provide smooth rolling and secure parking at transfer stations.

고객 제품 관심사

Manual wafer transport must limit vibration, prevent box movement and remain easy to clean without obstructing cleanroom airflow.

Wafer boxes can slide on a flat trolley during turning or braking.Angled shelves, dividers and retaining rails constrain each carrier position.

Small hard casters transmit floor joints directly to fragile wafer loads.Larger polyurethane wheels improve rolling smoothness and reduce shock transmission.

Box-section frames and solid shelves create difficult-to-clean particle traps.Rounded tubing and perforated shelf surfaces reduce ledges and hidden corners.

An unlocked cart can move while operators transfer a wafer box.Positive caster brakes secure the cart at loading and process-interface points.

일반적인 응용 프로그램

Wafer lot transport between process areasMetrology and inspection stagingSemiconductor cleanroom material movementControlled transfer of closed wafer boxes

기술 매개변수

Typical construction values for a stainless cleanroom wafer transfer cart are shown below.

핵심 재료	304 or 316L stainless steel tubular frame with stainless perforated shelves
패널 두께	1.0-1.5 mm shelf sheet thickness
유효 폭	750-1450 mm cart width
최대 길이	Up to 1600 mm cart length
강철 면면 두께	1.0-1.5 mm stainless steel shelves and retaining panels
코어 밀도	7850-8000 kg/m³ for stainless steel components
열전도도 (Thermal Conductivity)	14-17 W/(m·K) for stainless steel structure
표면 마무리	Brushed or electropolished stainless steel with smooth deburred edges
접합 유형	Continuous welded tubular frame with removable shelf dividers and locking caster plates
사용자 정의	의도된 응용 프로그램 및 운영 환경에 따라 사용할 수 있습니다.

사용 가능한 옵션

150 mm, 200 mm or 300 mm box layoutAngled or level perforated shelves304 or 316L stainless steelCustom shelf and retaining-rail arrangement

Planning a Wafer Transfer Cart specification?

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