Three-quarter view of a slim anodized aluminium equipment fan filter unit with blue connector module

FFU and Terminal Air Purification Equipment

Equipment Fan Filter Unit (EFU)

A compact custom-format filtration module designed for direct integration into semiconductor tools, enclosures and production equipment with restricted internal space.

Ultra-Compact Tool Integration
Custom Footprint and Connector
Low-Vibration EC Fan
HEPA or ULPA Mini-Pleat

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Product Introduction

The equipment fan filter unit is engineered as part of a process tool rather than as a ceiling tile. Its shallow aluminium enclosure carries slim EC centrifugal fans beside or above a low-depth HEPA or ULPA mini-pleat panel, leaving more usable space inside the machine. Mounting holes, cable connectors, airflow direction and service access can be arranged around the tool frame. Low-vibration fan isolation and a rigid filter support help protect stages, sensors and precision transport mechanisms located immediately downstream of the clean-air module.

Key Features

A low-profile fan and mini-pleat filter stack fits inside equipment zones unavailable to a standard ceiling FFU.

Mounting datum holes and electrical connectors can align directly with the process-tool chassis.

Elastomer fan isolators reduce vibration transfer into metrology stages and precision handling mechanisms.

Top, side or downward airflow orientation permits the same filtration principle to follow the equipment layout.

Customer Product Concerns

Process equipment has tighter space, vibration and interface constraints than a room ceiling, so a generic FFU rarely fits without compromise.

A standard 300 mm FFU consumes the service space required above a compact semiconductor tool.A slim fan array and low-depth mini-pleat filter reduce the installed module height.

Field-drilled mounting holes create misalignment and metal debris inside new equipment.Tool-specific datum holes and brackets are manufactured into the EFU housing before assembly.

Fan vibration disturbs imaging, alignment or robotic positioning accuracy.Balanced EC impellers and elastomer isolation mounts separate rotating components from the machine frame.

A generic connector or airflow direction conflicts with existing tool wiring and internal ducts.Cable interface, controller position and outlet orientation are configured around the equipment architecture.

Typical Applications

Wafer processing equipmentFlat-panel display toolsLithium battery production machinesSMT and electronics enclosuresPrecision optical inspection systems

Technical Parameters

Representative material and dimensional ranges for a process-tool EFU are provided below.

Core Material	Slim EC centrifugal fan array with low-depth micro-glass HEPA or ULPA mini-pleat filter
Panel Thickness	100-250 mm overall equipment-module depth
Effective Width	300-1200 mm active filtration width
Maximum Length	Up to 1800 mm custom equipment length
Steel Facing Thickness	0.8-1.2 mm aluminium or stainless-steel equipment housing
Core Density	Approximately 90-120 kg/m³ compacted density of the mini-pleat pack integrated into the equipment FFU
Thermal Conductivity	Approximately 0.035-0.043 W/(m·K) for the compact micro-glass pack used in the equipment FFU
Surface Finish	Clear anodized aluminium or brushed 304 stainless steel with blue low-voltage control module
Joint Type	Tool-specific bolted flange with elastomer isolation pads and gasketed filter cassette
Customization	Available based on the intended application and operating environment.

Available Options

70-250 mm low-profile construction rangeTop, side or downward dischargeHEPA H14 or ULPA U15-U16 mediaAnalogue, Modbus or equipment-I/O control

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