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УФУ и терминальное оборудование для очистки воздуха
Оборудование вентиляторный фильтр блока (EFU)
A compact custom-format filtration module designed for direct integration into semiconductor tools, enclosures and production equipment with restricted internal space.
- Ultra-Compact Tool Integration
- Custom Footprint and Connector
- Low-Vibration EC Fan
- HEPA or ULPA Mini-Pleat
Введение продукции
The equipment fan filter unit is engineered as part of a process tool rather than as a ceiling tile. Its shallow aluminium enclosure carries slim EC centrifugal fans beside or above a low-depth HEPA or ULPA mini-pleat panel, leaving more usable space inside the machine. Mounting holes, cable connectors, airflow direction and service access can be arranged around the tool frame. Low-vibration fan isolation and a rigid filter support help protect stages, sensors and precision transport mechanisms located immediately downstream of the clean-air module.
Основные характеристики
Mounting datum holes and electrical connectors can align directly with the process-tool chassis.
Elastomer fan isolators reduce vibration transfer into metrology stages and precision handling mechanisms.
Top, side or downward airflow orientation permits the same filtration principle to follow the equipment layout.
Обеспокоенность клиентов продуктами
Process equipment has tighter space, vibration and interface constraints than a room ceiling, so a generic FFU rarely fits without compromise.
A standard 300 mm FFU consumes the service space required above a compact semiconductor tool.A slim fan array and low-depth mini-pleat filter reduce the installed module height.
Field-drilled mounting holes create misalignment and metal debris inside new equipment.Tool-specific datum holes and brackets are manufactured into the EFU housing before assembly.
Fan vibration disturbs imaging, alignment or robotic positioning accuracy.Balanced EC impellers and elastomer isolation mounts separate rotating components from the machine frame.
A generic connector or airflow direction conflicts with existing tool wiring and internal ducts.Cable interface, controller position and outlet orientation are configured around the equipment architecture.
Типичные приложения
Wafer processing equipmentFlat-panel display toolsLithium battery production machinesSMT and electronics enclosuresPrecision optical inspection systems
Технические параметры
Representative material and dimensional ranges for a process-tool EFU are provided below.
| Основной материал | Slim EC centrifugal fan array with low-depth micro-glass HEPA or ULPA mini-pleat filter |
|---|---|
| Толщина панели | 100-250 mm overall equipment-module depth |
| эффективная ширина | 300-1200 mm active filtration width |
| Максимальная длина | Up to 1800 mm custom equipment length |
| Толщина линий стали | 0.8-1.2 mm aluminium or stainless-steel equipment housing |
| Плотность ядра | Approximately 90-120 kg/m³ compacted density of the mini-pleat pack integrated into the equipment FFU |
| Теплопроводимость | Approximately 0.035-0.043 W/(m·K) for the compact micro-glass pack used in the equipment FFU |
| Поверхностная отделка | Clear anodized aluminium or brushed 304 stainless steel with blue low-voltage control module |
| Объединенный тип | Tool-specific bolted flange with elastomer isolation pads and gasketed filter cassette |
| Customization | Доступно в зависимости от предполагаемого применения и операционной среды. |
Доступные варианты
70-250 mm low-profile construction rangeTop, side or downward dischargeHEPA H14 or ULPA U15-U16 mediaAnalogue, Modbus or equipment-I/O control
Planning a Equipment Fan Filter Unit (EFU) specification?
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