Cleanroom Utility Systems

Wet Gas Scrubber

Compact point-of-use wet scrubber with a recirculated wash stage, packed gas-liquid contact section, spray distribution and final mist separation for water-soluble process exhaust contaminants.

Local treatment close to wet-process exhaust sources
Packed counter-current contact with controlled liquid recirculation
Integrated droplet separation and process-tool interfaces

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Product Introduction

The Wet Gas Scrubber is a compact point-of-use system for exhaust from semiconductor wet-clean tools and other processes that release compatible water-soluble gases, droplets or salts. Contaminated air enters a dedicated pre-scrub zone, moves upward through an irrigated packed column and leaves through a mist eliminator. A recirculation tank, chemical-resistant pump and spray header maintain liquid distribution while the controller supervises level, flow, pressure and selected liquid-condition signals. One- and two-stage arrangements allow different scrubbing liquids where the chemistry requires separation. Gas identity, loading, reaction products, liquid composition, blowdown and downstream monitoring remain application-specific design inputs.

Key Features

Point-of-use placement shortens loaded exhaust runs and reduces deposition in remote ductwork

Counter-current packing provides a large wetted surface within a compact cabinet footprint

A pre-scrub spray zone intercepts droplets and reduces direct loading on the packed section

Dedicated circulation tank and chemical-resistant pump maintain stable wash-liquid delivery

A final demister limits liquid carryover into the clean-gas connection

Separate stage options allow incompatible absorption chemistries to remain isolated

Level, circulation-flow and pressure signals support practical alarm and interlock logic

Front and side service access keeps pump, tank, spray header and packing reachable

Process-tool communication can coordinate standby, operating and bypass conditions

Polypropylene wetted parts provide a practical material basis for many compatible aqueous duties

Customer Product Concerns

Wet scrubbing performance depends on contaminant chemistry and controlled gas-liquid contact. Stable pressure, compatible materials, liquid condition, solids management and carryover control must be established for the installed process.

A water-soluble contaminant can still pass through when the selected liquid does not provide enough absorption or reaction capacityDefine the gas mixture, concentration and reaction chemistry, then select water, acid or alkaline liquor and contact stages accordingly.

Uneven spray distribution or dry packing zones reduce the effective mass-transfer areaUse a correctly sized spray header, verify recirculation flow and include accessible nozzles for inspection and cleaning.

Salts and particulate by-products can block nozzles, packing or drain passagesAssess solids formation, provide suitable blowdown and filtration, and set maintenance triggers from the real loading profile.

Pressure variation at the process tool can disturb sensitive wet-clean operationCoordinate fan control, duct resistance, bypass logic and pressure monitoring with the tool exhaust requirement.

Mist carryover can wet downstream ducts and transfer absorbed chemistry beyond the scrubberMatch gas velocity to the demister, monitor liquid condition and keep the separator accessible for washing or replacement.

Combining incompatible acids, bases or oxidizers in one loop can create heat, precipitate or hazardous reactionsReview the complete exhaust recipe and separate wash stages or exhaust streams when one recirculation chemistry is not safe.

Typical Applications

Single-wafer wet-clean exhaust containing compatible acid, ammonia or water-soluble solvent vaporsSemiconductor and display wet benches producing droplets, salts and soluble chemical fumesPhotovoltaic and electronics cleaning tools requiring localized wet exhaust treatmentPilot-line chemical processes with variable but characterized aqueous exhaust loadsClean-manufacturing subfabs where compact local treatment reduces central scrubber demand

Technical Parameters

The displayed basis is a compact single-stage cabinet approximately 1500 mm wide, 1100 mm deep and 2000 mm high, with polypropylene wetted internals, one packed column, one recirculation tank, one pump and a final mist eliminator. The site's fixed ten-row schema uses panel-oriented labels; here Panel Thickness represents cabinet depth and Steel Facing Thickness describes the removable outer panels rather than the polypropylene process vessel. Exhaust flow, contaminant load, liquid chemistry, packing depth, pump duty, blowdown and controls are selected for the actual process.

Core Material	Welded polypropylene wetted column, tank, spray piping and packing inside a powder-coated metal support cabinet
Panel Thickness	1100 mm representative overall cabinet depth for the selected compact single-stage basis
Effective Width	1500 mm representative cabinet width excluding external duct-transition clearance
Maximum Length	2000 mm representative overall height before optional upper bypass or site ductwork
Steel Facing Thickness	1.2 mm nominal removable powder-coated outer panels; wetted process parts are nonmetallic
Core Density	Approximately 910 kg/m³ representative density for polypropylene wetted components
Thermal Conductivity	Approximately 0.22 W/(m·K) for representative polypropylene near room temperature
Surface Finish	Warm off-white powder-coated cabinet with smooth natural-gray polypropylene wetted surfaces and restrained blue utility piping
Joint Type	Flanged exhaust connections with fusion-welded polypropylene liquid joints and service unions at the pump, tank and spray loop
Customization	Available based on the intended application and operating environment.

Available Options

Single- or two-stage packed scrubbing arrangementWater, alkaline or acidic wash-liquid service after compatibility reviewAlternative packing type and contact depthVariable-speed circulation pump and redundant pump arrangementConductivity, pH, oxidation-reduction potential, level and flow instrumentationAutomatic make-up, dosing, blowdown and drain interfacesProcess-tool interface, bypass damper and pressure-control optionsPolypropylene, PVC, PVDF or compatible dual-laminate wetted constructionLocal touchscreen, remote alarm contacts and industrial-network connection

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