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FFU ve Terminal Hava Arıtma Ekipmanı
AMC Kimyasal Filtre FFU
A two-stage fan filter unit that combines target-specific molecular adsorbent media with downstream HEPA or ULPA filtration for contamination-sensitive processes.
- Targeted AMC Adsorbents
- Two-Stage Filtration
- Low-Outgassing Construction
- Replaceable Media Cassettes
Ürün tanıtımı
The AMC chemical filter FFU is built around a removable molecular panel installed upstream of a particulate final filter. Activated carbon captures volatile organic compounds, impregnated carbon targets acidic species and ion-exchange media can be selected for alkaline contaminants such as ammonia. The downstream HEPA or ULPA stage retains particles released by the incoming air stream and protects the clean zone after the adsorption section. A deeper EC fan plenum provides the additional pressure needed for both stages without forcing a separate chemical-filter bank into the ceiling return path.
Ana Özellikler
The molecular panel sits upstream of the particulate filter so captured gases do not bypass the final clean-air face.
Low-outgassing frame, gasket and sealant materials reduce secondary contamination inside sensitive clean zones.
Separate cassette access permits the chemical stage to be changed according to its own service life.
Müşteri Ürün Sorunları
Particle counts alone do not reveal molecular contaminants that can corrode conductors, change photoresist chemistry or deposit films on precision surfaces.
Trace ammonia or acidic gases can shift sensitive process chemistry even when the cleanroom particle count is acceptable.A selected base- or acid-targeted adsorbent layer removes the relevant molecular species before supply air reaches the process.
One general-purpose carbon bed performs poorly when the contaminant mixture contains dissimilar compounds.Multiple embedded media types can be arranged in the same cassette for defined acids, bases and organic vapours.
Chemical media can shed particles or emit compounds that burden a downstream process zone.Cleanroom-grade low-shedding media is followed by a HEPA or ULPA panel that captures particulate carryover.
Replacing both filter stages together wastes usable particulate-filter life.Independent molecular and final-filter access allows each stage to follow its own pressure-drop or exposure schedule.
Tipik uygulamalar
Photolithography and coating areasSemiconductor metrology roomsReticle and wafer storageFlat-panel display processingBattery material dry rooms
Teknik parametreler
Typical material and dimensional ranges for an AMC chemical filter FFU are shown below.
| Temel malzemeler | Activated carbon, impregnated carbon or ion-exchange adsorbent panel upstream of a micro-glass HEPA or ULPA pack |
|---|---|
| Panel kalınlığı | 400-620 mm overall module depth, depending on molecular media depth |
| Effective Width (Etkili Genişlik) | 575-1175 mm nominal ceiling-grid width |
| Maksimum uzunluk | Up to 1220 mm standard module length |
| Çelik yüz yüze kalınlığı | 1.0-1.5 mm powder-coated or stainless-steel plenum sheet |
| Core Density (Çekirdek Yoğunluğu) | Approximately 350-550 kg/m³ bulk density for selected granular or embedded adsorbent media |
| Termal İletkenlik | Approximately 0.08-0.20 W/(m·K) for the selected dry carbon-based adsorption layer |
| Yüzey bitirme | Low-outgassing white powder coat or brushed 304 stainless steel |
| Ortak tip | Gasketed removable AMC cassette with downstream gel-seal or compression-seal particulate filter |
| Customization (Özelleşme) | Kullanılan uygulama ve çalışma ortamına göre kullanılabilir. |
Mevcut Seçenekler
Acid, base, VOC or combined adsorbent blendHEPA H14 or ULPA U15-U16 final stageGas sampling portsDifferential-pressure monitoring for both stages
Planning a AMC Chemical Filter FFU specification?
Bize boyutlarınızı, montaj koşullarınızı, performans hedeflerinizi ve gerekli yüzey kaplamalarınızı gönderin.
