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FFU und Terminalluftreinigungsanlagen
AMC Chemischer Filter FFU
A two-stage fan filter unit that combines target-specific molecular adsorbent media with downstream HEPA or ULPA filtration for contamination-sensitive processes.
- Targeted AMC Adsorbents
- Two-Stage Filtration
- Low-Outgassing Construction
- Replaceable Media Cassettes
Produkteinführung
The AMC chemical filter FFU is built around a removable molecular panel installed upstream of a particulate final filter. Activated carbon captures volatile organic compounds, impregnated carbon targets acidic species and ion-exchange media can be selected for alkaline contaminants such as ammonia. The downstream HEPA or ULPA stage retains particles released by the incoming air stream and protects the clean zone after the adsorption section. A deeper EC fan plenum provides the additional pressure needed for both stages without forcing a separate chemical-filter bank into the ceiling return path.
Key Features
The molecular panel sits upstream of the particulate filter so captured gases do not bypass the final clean-air face.
Low-outgassing frame, gasket and sealant materials reduce secondary contamination inside sensitive clean zones.
Separate cassette access permits the chemical stage to be changed according to its own service life.
Kunden Produktbedenken
Particle counts alone do not reveal molecular contaminants that can corrode conductors, change photoresist chemistry or deposit films on precision surfaces.
Trace ammonia or acidic gases can shift sensitive process chemistry even when the cleanroom particle count is acceptable.A selected base- or acid-targeted adsorbent layer removes the relevant molecular species before supply air reaches the process.
One general-purpose carbon bed performs poorly when the contaminant mixture contains dissimilar compounds.Multiple embedded media types can be arranged in the same cassette for defined acids, bases and organic vapours.
Chemical media can shed particles or emit compounds that burden a downstream process zone.Cleanroom-grade low-shedding media is followed by a HEPA or ULPA panel that captures particulate carryover.
Replacing both filter stages together wastes usable particulate-filter life.Independent molecular and final-filter access allows each stage to follow its own pressure-drop or exposure schedule.
Typische Anwendungen
Photolithography and coating areasSemiconductor metrology roomsReticle and wafer storageFlat-panel display processingBattery material dry rooms
Technische Parameter
Typical material and dimensional ranges for an AMC chemical filter FFU are shown below.
| Core Material | Activated carbon, impregnated carbon or ion-exchange adsorbent panel upstream of a micro-glass HEPA or ULPA pack |
|---|---|
| Panel Dicke | 400-620 mm overall module depth, depending on molecular media depth |
| Effektive Breite | 575-1175 mm nominal ceiling-grid width |
| Maximale Länge | Bis zu 1220 mm Standardmodullänge |
| Stahl facing Dicke | 1.0-1.5 mm powder-coated or stainless-steel plenum sheet |
| Kerndichte | Approximately 350-550 kg/m³ bulk density for selected granular or embedded adsorbent media |
| Thermische Leitfähigkeit | Approximately 0.08-0.20 W/(m·K) for the selected dry carbon-based adsorption layer |
| Oberfläche Finish | Low-outgassing white powder coat or brushed 304 stainless steel |
| Gemeinsamer Typ | Gasketed removable AMC cassette with downstream gel-seal or compression-seal particulate filter |
| Customisierung | Verfügbar je nach beabsichtigter Anwendung und Betriebsumgebung. |
Verfügbare Optionen
Acid, base, VOC or combined adsorbent blendHEPA H14 or ULPA U15-U16 final stageGas sampling portsDifferential-pressure monitoring for both stages
Planning a AMC Chemical Filter FFU specification?
Senden Sie uns Ihre Abmessungen, Installationsbedingungen, Leistungsziele und gewünschte Oberflächenveredelung.
