Cleanroom Utility Systems

Vacuum Point-of-Use Valve

A compact manual 316L angle valve that gives a cleanroom user direct vacuum isolation through two KF16 ports, a bellows-isolated stem, FKM seat sealing and an accessible black handwheel.

DN10 vacuum angle valve with dual KF16 ports
316L stainless flow body with bellows-isolated motion
Manual handwheel isolation from 1 x 10^-7 mbar to 5 bar absolute

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Product Introduction

The Vacuum Point-of-Use Valve is a single terminal isolation device for connecting a cleanroom tool, chamber or laboratory user to a central vacuum branch. The locked catalogue configuration uses one compact DN10 right-angle body, two KF16 vacuum flanges, one vertical bonnet, one bellows-isolated stem, one soft-seat poppet and one removable black manual handwheel. Natural uncoated 316L stainless surfaces provide a durable metallic utility interface, while FKM plate and bonnet seals support a published high-vacuum-to-positive-absolute-pressure operating envelope when media compatibility and leak criteria are matched to the duty. The angle path changes flow direction within the valve, allowing an accessible operator at a constrained service point without presenting an exposed sliding stem seal to the vacuum bore. This is one valve, not the supported pipe ring, tee, drain and rack represented by ID 1933, and it is not a positive-pressure gas regulator or flow-control valve.

Key Features

A true 90-degree vacuum body combines user shut-off and a direction change in one compact terminal component

Two ISO-KF16 flange faces create repeatable demountable boundaries for the supported branch and point-of-use connection

Bellows-isolated stem motion keeps the operating mechanism separated from the evacuated flow path

AISI 316L wetted metal provides corrosion resistance and low-shedding natural stainless surfaces for clean utility installations

The manual black handwheel gives local open-close control without instrument air, wiring, solenoid heat or controller setup

FKM plate and bonnet seals provide a practical high-vacuum soft-seal configuration when compatible with the process gas and cleaning method

The DN10 bore and short angle path preserve useful molecular-flow conductance for a compact terminal outlet

Any-orientation mounting allows the handwheel and user port to remain accessible while connected tubing is independently supported

Customer Product Concerns

A terminal vacuum valve must isolate inward leakage without sacrificing conductance, contaminating the line or transferring installation loads into small vacuum flanges.

A valve sold only for positive-pressure gas duty may seal outward yet admit air through its stem packing under vacuumUse a vacuum-rated angle valve with bellows-isolated stem motion and verify the complete body, seat and bonnet leak specification at the required absolute pressure.

An oversized or tortuous terminal valve can slow evacuation even when the central pump has adequate capacityMatch the DN10 bore and KF16 conductance to user volume, target pressure and acceptable pump-down time before freezing the point-of-use size.

Pipe weight or misaligned clamps can distort a small flange and create an intermittent virtual or external leakSupport both connected runs independently, align the KF16 centering rings and tighten the clamps evenly without using the valve as a structural hanger.

A general elastomer may swell, outgas or lose sealing force when exposed to process vapor or aggressive cleaning chemistryConfirm FKM compatibility for the actual gas, vapor and cleaning method, or select a qualified alternate seal and repeat the leak acceptance test.

Users may mistake a local shut-off handwheel for a pressure-setting control and operate the process at an unstable vacuum levelTreat this device as open-close isolation; add a separately selected pressure controller and throttling valve when closed-loop absolute-pressure control is required.

A point-of-use connection left open during hose removal can pull room air and particles into the central branchClose the valve before disconnecting the user, vent the local volume safely and cap the exposed KF interface with clean compatible hardware.

Typical Applications

Cleanroom process-tool vacuum isolation at a local utility dropLaboratory chamber and instrument evacuation connectionsSemiconductor and electronics equipment service vacuum outletsPackaging, pick-and-place and fixture vacuum stations in controlled areasPilot-scale pharmaceutical equipment utility connections downstream of suitable protectionGeneral dry, clean and inert-gas vacuum service within the selected seal compatibility range

Technical Parameters

The catalogue basis is one purchasable SKU-class manual DN10 vacuum angle valve with two KF16 ports, a natural-silver AISI 316L body, one vertical bonnet, bellows-isolated stem travel, FKM plate/bonnet sealing and one removable black handwheel. The representative published range is 1 x 10^-7 mbar to 5 bar absolute, with approximately 5 L/s molecular-flow conductance for the KF16/DN10 configuration. The upstream flange joins an independently supported vacuum branch and the perpendicular flange faces the tool or capped service connection. Final seal compound, cleanliness preparation, allowable differential pressure and leak-test acceptance remain selectable for the process.

Core Material	AISI 316L / 1.4404-class stainless valve body, poppet and bellows assembly with FKM plate and bonnet sealing
Panel Thickness	2.0 mm nominal 316L support-bracket thickness when a separate point-of-use mounting bracket is selected
Effective Width	29.97 mm KF16 flange outside diameter with DN10 nominal valve bore
Maximum Length	Up to 100 mm representative overall valve envelope before connected tube or cap hardware
Steel Facing Thickness	0 mm separate steel facing; the product uses a solid stainless valve body
Core Density	Approximately 8000 kg/m³ representative density for AISI 316L stainless steel
Thermal Conductivity	Approximately 15 W/(m·K) near 20°C for representative AISI 316L stainless steel
Surface Finish	Uncoated natural-silver 316L body with neutral satin exterior and clean machined KF sealing faces; black polymer handwheel
Joint Type	Two ISO-KF16 vacuum flange interfaces using matched centering rings, FKM O-rings and external clamps
Customization	Available based on the intended application and operating environment.

Available Options

KF16, KF25 or application-sized vacuum ports selected from conductance and user connection requirementsManual removable handwheel or normally closed pneumatic actuator with optional position indicationFKM, FFKM or process-qualified alternate soft-seal compoundsCF metal-seal configuration for higher-vacuum or elevated-bake requirementsCleaned, bagged or higher-purity surface preparation matched to the contamination-control planPanel, wall or equipment-frame support bracket that does not load the vacuum flangesClean blanking cap, hose adapter or rigid tool connection supplied as separately selected interface hardware

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