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Cleanroom Utility Systems
Mass Flow Controller
A compact metal-sealed digital mass flow controller that combines a thermal flow sensor, closed-loop electronics and a normally closed control valve for repeatable dosing of compatible high-purity gases.
- Closed-loop measurement and gas-flow control
- Metal-sealed 316L high-purity flow path
- Compact face-seal format for gas-panel integration
Product Introduction
The Mass Flow Controller is a compact electronic gas-dosing instrument for clean process lines and equipment gas boxes. The selected catalogue configuration combines one electropolished 316L stainless flow body, one thermal bypass sensor, one normally closed proportional control valve and one dark anodized electronics housing. Gas enters through one 1/4 in. gasket face-seal fitting, divides between the main passage and calibrated sensor path, and leaves through the opposed fitting after the valve. Embedded electronics compare measured mass flow with the external setpoint and adjust the valve continuously. The unit is supplied as one inline controller without a local display, cable, power supply, isolation valve, pressure regulator, filter, purge manifold or remote operator terminal; these remain functions of the surrounding gas-delivery system.
Key Features
Metal-sealed 316L wetted construction limits elastomer exposure in compatible high-purity service
A thermal bypass sensor measures gas mass flow without a moving primary sensing element
The normally closed valve supports a defined safe state when electrical power is removed
Digital compensation and stored gas data can support configurable gas and full-scale selections
Opposed face-seal ports provide a short inline flow path for gas-box and tool integration
Low internal volume supports efficient purging during gas changes and planned maintenance
Status indicators provide local power, health or network information without a large display
Multiple analogue and digital communication formats are available for equipment-control systems
Compact mounting geometry allows several controllers to be arranged in parallel gas-stick assemblies
Customer Product Concerns
Stable mass-flow control depends on correct gas calibration, pressure conditions, valve sizing and clean installation; the connector and face-seal size alone do not define a suitable controller.
A controller calibrated for one gas can report the wrong flow when used with a gas of different thermal propertiesSelect the exact process gas or a validated multi-gas conversion and confirm the reference temperature and pressure used for standard flow units.
Insufficient inlet-to-outlet pressure drop can prevent the proportional valve from reaching the commanded flowCheck minimum operating differential pressure at the maximum recipe flow and size upstream regulation and downstream restriction accordingly.
An oversized full-scale range reduces useful command resolution at the normal operating pointChoose the lowest full-scale range that safely covers peak demand, purge flow and the intended control margin.
Particles or damaged gaskets introduced during installation can disturb the valve seat or contaminate the process lineKeep port caps fitted until assembly, use new compatible face-seal gaskets and complete a controlled leak check and purge before service.
Supply-pressure transients can appear as flow disturbances even when the electronic setpoint is steadyStabilize upstream pressure, avoid simultaneous high-demand branch events and select a pressure-insensitive architecture when the process requires it.
A communication mismatch can leave the device powered but unavailable to the equipment controllerFreeze the required electrical connector, power, analogue scaling or digital protocol, node settings and fail-state behavior before ordering.
Typical Applications
Semiconductor process tools dosing inert, reactive or carrier gases within compatible material limitsThin-film deposition, etching and plasma systems requiring controlled precursor or process-gas flowPhotovoltaic, LED and display manufacturing equipment with repeatable gas recipe deliveryLaboratory reactors and pilot systems using electronically commanded high-purity gas dosingAnalytical instruments blending calibration, zero, carrier or support gasesOEM gas boxes and valve manifold panels requiring compact networked flow-control channels
Technical Parameters
The selected catalogue basis follows a Brooks GF100 VX-class metal-sealed thermal mass flow controller with a 316L VIM/VAR high-purity flow path, normally closed valve, 1/4 in. face-seal fittings, compact digital electronics and a 38 mm body-width by 124 mm face-to-face format. The geometry and material-property entries below describe one representative compact configuration required by the site's fixed ten-row schema; they are not universal dimensions or performance ratings for every MFC. Final gas, flow range, pressure differential, valve orifice, calibration, communication, sealing materials and cleaning level must be selected for the intended duty.
| Core Material | Electropolished 316L VIM/VAR stainless flow body and sensor path with corrosion-resistant metal seals, valve internals and a gas-compatible seat |
|---|---|
| Panel Thickness | 0.5 mm nominal 316L stainless thermal-sensor bypass-tube wall for the selected compact design basis |
| Effective Width | 38 mm nominal instrument body width for the selected 1/4 in. face-seal configuration |
| Maximum Length | 124 mm nominal face-to-face length across the selected opposed 1/4 in. gasket face-seal fittings |
| Steel Facing Thickness | 1.2 mm nominal 316 stainless flow-body shield wall for the selected construction |
| Core Density | 8000 kg/m³ nominal density of the selected 316L stainless wetted-body material |
| Thermal Conductivity | 15 W/(m·K) representative thermal conductivity of 316L stainless steel near 20°C |
| Surface Finish | Natural-silver electropolished high-purity wetted path at approximately 0.13-0.25 µm Ra with a dark anodized aluminium electronics cover |
| Joint Type | Opposed 1/4 in. male gasket face-seal inlet and outlet with metal-sealed sensor and control-valve interfaces |
| Customization | Available based on the intended application and operating environment. |
Available Options
Full-scale gas ranges selected from low-sccm dosing to higher-slm process serviceFactory gas calibration or validated multi-gas and multi-range configurationNormally closed, normally open or meter-only valve arrangements where available1/4 in. face-seal or compatible downport surface-mount connection formatsAnalogue voltage or current command and output signalsRS-485, DeviceNet, EtherCAT or other supported equipment-network interfacesAlternative electrical connector orientation and low-profile adapter cablesPressure-insensitive or inlet-pressure-sensing variants for demanding gas deliveryElectronic-grade cleaning, protective capping and double-bagged packaging options
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