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Оборудование для чистых помещений
Сухой шкаф для хранения пластинки
A cassette-organized low-humidity cabinet designed to hold semiconductor wafers vertically under monitored dry-gas conditions.
- Dedicated Wafer Cassette Slots
- Monitored Low Humidity
- Dry-Gas Distribution
- Static-Control Panel Options
Введение продукции
The wafer dry storage cabinet adds purpose-built vertical cassette dividers to a sealed nitrogen-purged enclosure. The rack geometry separates wafer carriers, improves retrieval order and keeps purge paths open around each stored position. Transparent gasketed doors permit inventory checks without disturbing the chamber, while the external humidity display and flow controls provide a clear operating reference.
Основные характеристики
Perforated shelves and distributed inlets maintain open dry-gas paths around stored lots.
External humidity indication supports condition checks without opening the cabinet.
Sealed static-dissipative panel options combine visibility with electrostatic-control practice.
Обеспокоенность клиентов продуктами
Wafer cassettes require both controlled humidity and organized support that avoids contact, crowding and unnecessary door-open time.
Loose wafer carriers can shift or touch during loading.Dedicated vertical dividers maintain spacing and repeatable cassette orientation.
Blocked shelf areas create uneven purge circulation.Perforated shelves and open divider geometry preserve flow paths around each position.
Searching for the correct cassette prolongs door-open exposure.Visible indexed storage positions make the target lot easier to locate before access.
A single fixed cabinet layout cannot serve different cassette formats.Adjustable shelf and divider assemblies can be configured for the intended carrier dimensions.
Типичные приложения
Wafer cassette stagingLithography material bufferingMetrology queue storageDry storage between semiconductor processes
Технические параметры
Typical construction values for a wafer-specific dry storage cabinet are listed below.
| Основной материал | 304 stainless steel or anodized aluminum cabinet with static-dissipative PVC glazing and stainless cassette dividers |
|---|---|
| Толщина панели | 6-10 mm transparent enclosure panels |
| эффективная ширина | 700-1600 mm cabinet width |
| Максимальная длина | До 2200 мм высота шкафа |
| Толщина линий стали | 1.0-1.5 mm stainless cabinet and divider components |
| Плотность ядра | 1350-1420 kg/m³ for static-dissipative PVC and 7850-8000 kg/m³ for stainless components |
| Теплопроводимость | 0.15-0.19 W/(m·K) for PVC glazing |
| Поверхностная отделка | Brushed stainless steel, natural anodized aluminum and clear or amber static-dissipative panels |
| Объединенный тип | Gasketed hinged doors with adjustable slotted shelf and cassette-divider assemblies |
| Customization | Доступно в зависимости от предполагаемого применения и операционной среды. |
Доступные варианты
200 mm or 300 mm cassette layoutIndependent chamber purge controlAutomatic humidity regulationStatic-dissipative glazing
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