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Equipement de salle blanche spécifique à l'industrie
Cabinet de stockage sec par
A cassette-organized low-humidity cabinet designed to hold semiconductor wafers vertically under monitored dry-gas conditions.
- Dedicated Wafer Cassette Slots
- Monitored Low Humidity
- Dry-Gas Distribution
- Static-Control Panel Options
Introduction de produit
The wafer dry storage cabinet adds purpose-built vertical cassette dividers to a sealed nitrogen-purged enclosure. The rack geometry separates wafer carriers, improves retrieval order and keeps purge paths open around each stored position. Transparent gasketed doors permit inventory checks without disturbing the chamber, while the external humidity display and flow controls provide a clear operating reference.
Key Features
Perforated shelves and distributed inlets maintain open dry-gas paths around stored lots.
External humidity indication supports condition checks without opening the cabinet.
Sealed static-dissipative panel options combine visibility with electrostatic-control practice.
Préoccupations du client produit
Wafer cassettes require both controlled humidity and organized support that avoids contact, crowding and unnecessary door-open time.
Loose wafer carriers can shift or touch during loading.Dedicated vertical dividers maintain spacing and repeatable cassette orientation.
Blocked shelf areas create uneven purge circulation.Perforated shelves and open divider geometry preserve flow paths around each position.
Searching for the correct cassette prolongs door-open exposure.Visible indexed storage positions make the target lot easier to locate before access.
A single fixed cabinet layout cannot serve different cassette formats.Adjustable shelf and divider assemblies can be configured for the intended carrier dimensions.
Les applications typiques
Wafer cassette stagingLithography material bufferingMetrology queue storageDry storage between semiconductor processes
Paramètres techniques
Typical construction values for a wafer-specific dry storage cabinet are listed below.
| Matériaux de base | 304 stainless steel or anodized aluminum cabinet with static-dissipative PVC glazing and stainless cassette dividers |
|---|---|
| Panneau épaisseur | 6-10 Panneaux d'enveloppe transparents mm |
| Largeur effective | 700-1600 mm cabinet width |
| Longueur maximale | Jusqu'à 2200 mm de hauteur de cabinet |
| Acier face épaisseur | 1.0-1.5 mm stainless cabinet and divider components |
| Densité Core | 1350-1420 kg/m³ for static-dissipative PVC and 7850-8000 kg/m³ for stainless components |
| Conductivité thermique | 0.15-0.19 W/(m·K) for PVC glazing |
| surface finie | Brushed stainless steel, natural anodized aluminum and clear or amber static-dissipative panels |
| Type joint | Gasketed hinged doors with adjustable slotted shelf and cassette-divider assemblies |
| Customisation | Disponible en fonction de l'application prévue et de l'environnement d'exploitation. |
Options disponibles
200 mm or 300 mm cassette layoutIndependent chamber purge controlAutomatic humidity regulationStatic-dissipative glazing
Planning a Wafer Dry Storage Cabinet specification?
Envoyez-nous vos dimensions, conditions d'installation, objectifs de performance et finition de surface requise.
