Wafer dry storage cabinet in complete three-quarter view with vertical cassette slots

Peralatan Cleanroom Spesifik Industri

Kabinet Penyimpanan Kering Wafer

A cassette-organized low-humidity cabinet designed to hold semiconductor wafers vertically under monitored dry-gas conditions.

Dedicated Wafer Cassette Slots
Monitored Low Humidity
Dry-Gas Distribution
Static-Control Panel Options

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Perkenalan produk

The wafer dry storage cabinet adds purpose-built vertical cassette dividers to a sealed nitrogen-purged enclosure. The rack geometry separates wafer carriers, improves retrieval order and keeps purge paths open around each stored position. Transparent gasketed doors permit inventory checks without disturbing the chamber, while the external humidity display and flow controls provide a clear operating reference.

Fitur utama:

Vertical dividers keep wafer cassettes separated and consistently oriented.

Perforated shelves and distributed inlets maintain open dry-gas paths around stored lots.

External humidity indication supports condition checks without opening the cabinet.

Sealed static-dissipative panel options combine visibility with electrostatic-control practice.

Kekhawatiran produk pelanggan

Wafer cassettes require both controlled humidity and organized support that avoids contact, crowding and unnecessary door-open time.

Loose wafer carriers can shift or touch during loading.Dedicated vertical dividers maintain spacing and repeatable cassette orientation.

Blocked shelf areas create uneven purge circulation.Perforated shelves and open divider geometry preserve flow paths around each position.

Searching for the correct cassette prolongs door-open exposure.Visible indexed storage positions make the target lot easier to locate before access.

A single fixed cabinet layout cannot serve different cassette formats.Adjustable shelf and divider assemblies can be configured for the intended carrier dimensions.

Aplikasi yang Tipis

Wafer cassette stagingLithography material bufferingMetrology queue storageDry storage between semiconductor processes

Parameter teknis

Typical construction values for a wafer-specific dry storage cabinet are listed below.

Bahan inti	304 stainless steel or anodized aluminum cabinet with static-dissipative PVC glazing and stainless cassette dividers
Ketebalan Panel (Panel Thickness)	6-10 Panel enclosure transparan mm
Efektif lebar	700-1600 mm cabinet width
Panjang maksimum	Hingga 2200 mm ketinggian kabinet
Baja menghadap ketebalan	1.0-1.5 mm stainless cabinet and divider components
Kepadatan inti (core density)	1350-1420 kg/m³ for static-dissipative PVC and 7850-8000 kg/m³ for stainless components
Konduktivitas Termal (Thermal Conductivity)	0.15-0.19 W/(m·K) for PVC glazing
Permukaan selesai	Brushed stainless steel, natural anodized aluminum and clear or amber static-dissipative panels
Jenis Bersama	Gasketed hinged doors with adjustable slotted shelf and cassette-divider assemblies
Customization (Kustomisasi)	Tersedia berdasarkan aplikasi yang dimaksudkan dan lingkungan operasi.

Pilihan yang tersedia

200 mm or 300 mm cassette layoutIndependent chamber purge controlAutomatic humidity regulationStatic-dissipative glazing

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