Wafer dry storage cabinet in complete three-quarter view with vertical cassette slots

산업별 클린룸 장비

웨이퍼 건조 저장 캐비닛

A cassette-organized low-humidity cabinet designed to hold semiconductor wafers vertically under monitored dry-gas conditions.

Dedicated Wafer Cassette Slots
Monitored Low Humidity
Dry-Gas Distribution
Static-Control Panel Options

견적 요청 제품 찾아보기

상품 소개

The wafer dry storage cabinet adds purpose-built vertical cassette dividers to a sealed nitrogen-purged enclosure. The rack geometry separates wafer carriers, improves retrieval order and keeps purge paths open around each stored position. Transparent gasketed doors permit inventory checks without disturbing the chamber, while the external humidity display and flow controls provide a clear operating reference.

주요 기능

Vertical dividers keep wafer cassettes separated and consistently oriented.

Perforated shelves and distributed inlets maintain open dry-gas paths around stored lots.

External humidity indication supports condition checks without opening the cabinet.

Sealed static-dissipative panel options combine visibility with electrostatic-control practice.

고객 제품 관심사

Wafer cassettes require both controlled humidity and organized support that avoids contact, crowding and unnecessary door-open time.

Loose wafer carriers can shift or touch during loading.Dedicated vertical dividers maintain spacing and repeatable cassette orientation.

Blocked shelf areas create uneven purge circulation.Perforated shelves and open divider geometry preserve flow paths around each position.

Searching for the correct cassette prolongs door-open exposure.Visible indexed storage positions make the target lot easier to locate before access.

A single fixed cabinet layout cannot serve different cassette formats.Adjustable shelf and divider assemblies can be configured for the intended carrier dimensions.

일반적인 응용 프로그램

Wafer cassette stagingLithography material bufferingMetrology queue storageDry storage between semiconductor processes

기술 매개변수

Typical construction values for a wafer-specific dry storage cabinet are listed below.

핵심 재료	304 stainless steel or anodized aluminum cabinet with static-dissipative PVC glazing and stainless cassette dividers
패널 두께	6-10 mm 투명한 엔클로저 패널
유효 폭	700-1600 mm cabinet width
최대 길이	캐비닛 높이 최대 2200 mm
강철 면면 두께	1.0-1.5 mm stainless cabinet and divider components
코어 밀도	1350-1420 kg/m³ for static-dissipative PVC and 7850-8000 kg/m³ for stainless components
열전도도 (Thermal Conductivity)	0.15-0.19 W/(m·K) for PVC glazing
표면 마무리	Brushed stainless steel, natural anodized aluminum and clear or amber static-dissipative panels
접합 유형	Gasketed hinged doors with adjustable slotted shelf and cassette-divider assemblies
사용자 정의	의도된 응용 프로그램 및 운영 환경에 따라 사용할 수 있습니다.

사용 가능한 옵션

200 mm or 300 mm cassette layoutIndependent chamber purge controlAutomatic humidity regulationStatic-dissipative glazing

Planning a Wafer Dry Storage Cabinet specification?

치수, 설치 조건, 성능 목표 및 필요한 표면 마감을 보내십시오.

우리 팀과 대화하십시오.