High-purity gas purifier complete three-quarter view with one 316L cylindrical cartridge and two coaxial face-seal connections

クリーンルームユーティリティシステム

高純度ガス浄化器

A compact 316L inline purifier that combines gas-specific reactive media with an integral outlet particle filter to control selected trace contaminants close to a critical process connection.

Point-of-use trace-contaminant control
Gas-specific purifier media selected by duty
Compact coaxial 316L face-seal installation

見積もりリクエスト製品案内

商品紹介

The High-Purity Gas Purifier is a sealed, non-regenerable point-of-use cartridge for installation in a compatible high-purity gas line. The selected catalogue configuration is one natural-silver electropolished 316L cylindrical housing with a gas-specific reactive purification bed, an integral downstream particle-retention element, two welded transition shoulders and one coaxial 1/4 in. gasket face-seal connection at each end. Process gas passes through the selected media before reaching the protected tool or analytical user, helping isolate that user from short-term distribution upsets and residual line contamination. The cartridge contains no valve, pressure regulator, gauge, heater, controller, bypass, drain or replaceable external filter bowl; isolation, purging and pressure control belong to the surrounding gas system.

主要な特徴

Gas-specific reactive media targets the named impurity family instead of relying on one universal sorbent for every service

Point-of-use placement shortens the clean gas path between the final purification stage and the protected process connection

A sealed 316L pressure housing keeps the purification bed isolated from ambient exposure during normal operation

An integral downstream metal particle element retains fine media or installation particles before gas leaves the cartridge

Coaxial inlet and outlet connections allow the purifier to replace a short straight section of high-purity tubing

Electropolished gas-wetted hardware limits internal surface area and supports clean purge-down behavior

A diffusion-control structure protects reactive media from rapid ambient ingress while end seals are handled during installation

The symmetric cylindrical envelope supports horizontal or vertical mounting where the selected media is not orientation-sensitive

A permanent flow-direction mark helps prevent reversal of the purification bed and outlet-filter sequence

Multiple cartridge capacities and connection arrangements can be matched to gas identity, flow, pressure and contaminant load

お客様の製品に関する懸念事項

A point-of-use purifier must match the actual gas and impurity challenge while remaining protected from air exposure, reverse installation and service conditions that can consume or damage the purification bed.

A purifier chosen only by connection size may not remove the contaminants that affect the intended processDefine the source gas, required outlet contaminants, inlet challenge, normal flow and service duration before selecting the media family and cartridge capacity.

Ambient exposure during unpacking or connection can consume reactive capacity before process gas reaches the unitKeep the factory end seals in place until installation and use a controlled high-purity purge sequence immediately after connection.

Installing the cartridge backward can place the particle-retention stage on the wrong side of the media bedAlign the permanent flow arrow with the verified gas path and independently identify the upstream and downstream tubing before tightening.

Unplanned pressure drop can starve a tool during peak demand even when average flow appears acceptableSize the purifier using maximum instantaneous flow, inlet pressure and permitted pressure loss rather than nominal consumption alone.

A spent purifier can continue passing gas without an obvious external indication of lost contaminant capacityEstablish replacement intervals from impurity loading and throughput, then trend downstream gas quality where process risk justifies monitoring.

Using one cartridge across incompatible gases can create poor removal performance or an unsafe material interactionApprove the complete wetted material and purifier-media combination for the named gas, pressure, temperature and impurity mixture before installation.

典型的な用途

Semiconductor gas sticks supplying deposition, etch, epitaxy or ion-implant process toolsElectronics and photovoltaic manufacturing lines using high-purity inert or compatible process gasesAnalytical instruments requiring a final moisture, oxygen or hydrocarbon control stage near the inletResearch laboratories protecting sensitive reactors, gloveboxes or gas chromatographs from distribution upsetsHigh-purity nitrogen, argon, helium or hydrogen branches where the selected media is specifically compatibleSpecialty-gas delivery systems requiring a compact final purification cartridge downstream of pressure control

技術的なパラメータ

The selected catalogue basis follows a compact Pall Maxi Gaskleen-class sealed point-of-use purifier: a 208 mm face-to-face, 63.5 mm outside-diameter electropolished 316L assembly with male 1/4 in. gasket face-seal ends, reactive gas-specific media and integral downstream metal filtration. The fixed shell and packed-bed values below are conservative catalogue or design-basis entries for this selected compact configuration; they are not universal dimensions or performance claims for every purifier medium. Gas compatibility, targeted impurity species, inlet challenge, flow, pressure, temperature, required outlet quality and lifetime must be matched to the actual service.

コア材料	Gas-specific engineered inorganic oxide or reactive adsorbent bed with an integral downstream 316L stainless particle-retention element
パネルの厚さ	1.5 mm nominal cylindrical 316L pressure-shell wall for the selected compact purifier construction
有効幅	63.5 mm nominal maximum outside diameter for the selected point-of-use cartridge
最大長さ	208 mm representative face-to-face length for the selected compact inline configuration
鋼鉄の厚さを直面する	0.8 mm nominal 316L protective outer-sleeve and welded end-transition sheet thickness
コア密度	650-950 kg/m³ nominal packed-bed bulk density, depending on the selected purifier media
熱伝導率	0.20-0.45 W/(m·K) representative packed-bed range near ambient temperature
表面仕上げ	Natural-silver electropolished 316L gas-wetted hardware, with internal roughness up to 0.25 µm Ra for the selected catalogue class
ジョイントタイプ	Coaxial 1/4 in. male gasket face-seal inlet and outlet welded to sealed 316L transition shoulders
カスタマイズ	意図したアプリケーションと動作環境に基づいて利用できます。

利用可能なオプション

Media families for compatible inert, reducing, oxidizing, corrosive or specialty-gas dutiesCartridge capacity matched to expected impurity load and service interval1/4 in. or selected larger gasket face-seal connectionsMale, female or mixed face-seal end arrangementsStraight tube-stub connections for welded installation316L stainless or corrosion-resistant alloy wetted constructionIntegral inlet and outlet isolation-valve manifold where requiredHorizontal or vertical support brackets for the selected installationReplacement scheduling based on gas throughput and impurity challenge

Planning a High-Purity Gas Purifier specification?

寸法、設置条件、性能目標、必要な表面仕上げをお送りください。

チームに相談する