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Systèmes utilitaires Cleanroom
Boîte Manifold par
A vented four-branch distribution enclosure that receives one high-purity gas supply, regulates and monitors each outlet stick, and isolates individual tool feeds without shutting down the remaining branches.
- Four independently isolated pressure-regulated outlet sticks
- Exhausted enclosure with common emergency inlet shutdown
- Electropolished 316L UHP flow path with purge-ready branches
Introduction de produit
The Valve Manifold Box is an enclosed secondary gas-distribution station installed between a centralized gas source and several process tools. The selected catalogue configuration uses one welded light-gray steel enclosure, one self-latching windowed access door, one top exhaust collar, one common inlet isolation assembly and four parallel distribution sticks. Each stick contains one compact pressure regulator, one pressure gauge, two diaphragm shutoff valves and one dedicated outlet. A local controller monitors permissives and can close the normally closed inlet emergency-shutoff valve while individual branch isolation lets an operator service one tool feed without disturbing the other three. The enclosure contains no gas cylinder and is distinct from an exposed single-source pressure panel, an open valve manifold panel and a bare pipe manifold.
Key Features
Independent branch shutoff allows one downstream line to be isolated while unaffected outlets remain available
A dedicated regulator and gauge on every stick provide branch-specific delivery-pressure adjustment and indication
Electropolished 316L tubing, diaphragm valves and low-dead-volume fittings protect purity through the distribution split
Purge-ready stick layouts support controlled displacement of trapped gas before a branch is opened for maintenance
A normally closed inlet emergency-shutoff valve provides one defined isolation point for local or remote alarm response
The clear safety window permits operating-state checks without opening the exhausted enclosure
Rail-mounted modular sticks simplify branch replacement, capacity changes and gas-specific component selection
Préoccupations du client produit
A manifold box must preserve gas purity and branch independence while coordinating enclosure exhaust, pressure control, purge routing and emergency isolation with the actual source and tool requirements.
Shutting the central gas source to service one tool branch can interrupt every process connected to that sourceProvide dedicated upstream and downstream isolation on each distribution stick so the affected branch can be secured without closing the other qualified outlets.
A single pressure setting may not meet the different delivery conditions required by four downstream toolsSelect an individual regulator range and pressure indicator for each stick, then commission each outlet at its normal tool demand.
Opening a contaminated branch can release residual gas or introduce moisture into the shared UHP headerIsolate the branch from both the common inlet and tool line, then use its compatible purge or evacuation route before breaking a connection.
A leak inside an unvented distribution enclosure can accumulate around multiple live jointsUse a continuously exhausted VMB configuration with monitored airflow and route the exhaust to the facility handling system selected for the gas hazard.
A local alarm may not isolate the common source quickly enough to protect all four outlet sticksTie the normally closed inlet emergency-shutoff valve to the local controller, external emergency signal and selected gas or exhaust alarms.
Branch additions can create mixed component standards, excessive dead volume or unclear valve sequencingUse repeatable rail-mounted stick modules with consistent flow direction, permanent port identification and gas-compatible UHP components.
Les applications typiques
Semiconductor process-gas distribution from a gas cabinet to multiple wafer-processing toolsLED, photovoltaic and compound-semiconductor production lines with shared specialty-gas sourcesEpitaxy, deposition, etch and chamber-clean gas branch distributionAdvanced-material and nanotechnology pilot facilities requiring separately isolated tool feedsHigh-purity nitrogen, argon, hydrogen or compatible specialty-gas distribution in clean manufacturingResearch fabs that need compact secondary pressure reduction and centralized branch shutdown
Paramètres techniques
The catalogue basis is a wall-mounted four-stick semi-automatic VMB in the Applied Energy Systems SEMI-GAS and Critical Systems compact four-stick class. A representative enclosure is approximately 559 mm wide, 381 mm deep and 1118 mm high before the external exhaust and utility connections. The wetted flow path uses electropolished 316L stainless tubing and diaphragm components, with one common inlet and four separately regulated outlets. Exact pressure range, valve actuation, purge or evacuation circuit, gas detector, fire sensor, exhaust duty, electrical supply and communications are selected for the named gas and facility.
| Matériaux de base | Welded carbon-steel enclosure with electropolished AISI 316L stainless tubing, regulators, diaphragm valves and fittings in the wetted flow path |
|---|---|
| Panneau épaisseur | 3.0 mm nominal welded enclosure panel thickness for the selected four-stick configuration |
| Largeur effective | 559 mm representative external width for the selected four-stick wall-mounted enclosure |
| Longueur maximale | 1118 mm representative overall enclosure height before the external exhaust connection |
| Acier face épaisseur | 3.0 mm nominal powder-coated steel door and external facing thickness |
| Densité Core | Approximately 8000 kg/m³ representative density for AISI 316L stainless flow-path components |
| Conductivité thermique | Approximately 15 W/(m·K) near 20°C for representative AISI 316L wetted components |
| surface finie | Light-gray powder-coated enclosure with natural-silver electropolished 316L wetted surfaces and clean-finished sealing lands |
| Type joint | Orbital-welded 1/4 in. or 3/8 in. UHP tubing with metal face-seal service joints, one common inlet and four dedicated outlet connections |
| Customisation | Disponible en fonction de l'application prévue et de l'environnement d'exploitation. |
Options disponibles
Four-stick or eight-stick distribution arrangementsManual, semi-automatic or fully automatic branch operationBranch-specific regulator ranges, pressure gauges, switches or transducersPurge-only, evacuation-only or combined purge-and-evacuation circuitsNormally closed pneumatic emergency valves on the common inlet and individual sticksGas leak, UV/IR, temperature and exhaust-flow monitoringLocal touchscreen with dry-contact I/O, Modbus or selected facility communicationGas-specific seals, filters, purifiers, coaxial outlets and heat tracing
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